Modeling laser-assisted particle removal using molecular dynamics

Applied Physics A: Materials Science and Processing

Volumn 77, Issue 7, 2003, Pages 877-882

  Smith, K M ^a   Hussaini, M Y ^a   Gelb, L D ^b   Allen, S D ^a,c  

^a FLORIDA STATE UNIVERSITY   (United States)

^b WASHINGTON UNIVERSITY   (United States)

^c ARKANSAS STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; LASER APPLICATIONS; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; MOLECULES; PARTICLES (PARTICULATE MATTER); STATISTICAL METHODS; SUBSTRATES; TEMPERATURE; TWO DIMENSIONAL;

CLEANING EFFICIENCIES; ENERGY TRANSFER CLEANING; ENERGY TRANSFER MEDIUM; FLUID THICKNESS; LASER ASSISTED PARTICLE REMOVAL; STATISTICAL ACCURACY; TWO DIMENSIONAL MOLECULAR MODEL;

SURFACE CLEANING;

EID: 0142118320     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-003-2220-7     Document Type: Article

References (17)

1. A.C. Tam, W.P. Leung, W. Zapka, W. Ziemlich: J. Appl. Phys. 71, 3515 (1992)
2. S.D. Allen, A.S. Miller, S.J. Lee: Mater. Sci. Eng. B 49, 85 (1997)
3. Y.-F. Lu, Y. Zhang, W.-D. Song, D.S.H. Chan: Jpn. J. Appl. Phys. 37, L1330 (1998)
4. Y.F. Lu, W.D. Song, M.H. Hong, Y.W. Zheng, T.C. Chong: Tribol. Int. 33, 329 (2000)
5. Y. Dou, L.V. Zhigilei, Z. Postawa, N. Winograd, B.J. Garrison: Nucl. Instrum. Methods B 180, 105 (2001)
6. Y. Dou, L.V. Zhigilei, N. Winograd, B.J. Garrison: J. Phys. Chem. A 105, 2748 (2001)
7. M.P. Allen, D.J. Tildesley: Computer Simulation of Liquids (Oxford University Press, New York 2001)
8. R.R. Singh, K.S. Pitzer, J.J. de Pablo, J.M. Prausnitz: J. Chem. Phys. 92, 5463 (1990)
9. S.J. Lee, K. Imen, S.D. Allen: J. Appl. Phys. 74, 7044 (1993)
10. M. Mosbacher, V. Dobler, J. Boneberg, P. Leiderer: Appl. Phys. A 70, 669 (2000)
11. S.I. Kudryashov, S. Shukla, S.D. Allen: (unpublished result)
12. M. Mosbacher, N. Chaoui, J. Siegel, V. Dobler, J. Solis, J. Boneburg, C.N. Afonso, P. Leiderer: Appl. Phys. A 69 [Suppl.], S331 (1999)
13. H.K. Park, D. Kim, C.P. Grigoropoulos, A.C. Tam: J. Appl. Phys. 80, 4072 (1996)
14. O. Yavas, A. Schilling, J. Bischof, J. Boneberg, P. Leiderer: Appl. Phys. A 64, 331 (1997)
15. X. Wu, E. Sacher, M. Meunier: J. Appl. Phys. 87, 3618 (2000)
16. Y.P. Lee, Y.F. Lu, D.S.H. Chan, T.S. Low, M.S. Zhou: Jpn. J. Appl. Phys. 37, 2524 (1998)
17. Y.F. Lu, Y. Zhang, Y.H. Wan, W.D. Song: Appl. Surf. Sci. 138-139, 140 (1999)