메뉴 건너뛰기




Volumn 79, Issue 6, 1996, Pages 2857-2862

CO2 laser-assisted removal of submicron particles from solid surfaces

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0342763375     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361280     Document Type: Article
Times cited : (49)

References (26)
  • 11
    • 0026372426 scopus 로고
    • Lasers in Microelectronics Manufacturing, SPIE, Bellingham
    • A. C. Tam, W. Zapka, and W. Ziemlich, in Lasers in Microelectronics Manufacturing, SPIE Proc., Vol. 1598 (SPIE, Bellingham, 1991), p. 13.
    • (1991) SPIE Proc. , vol.1598 , pp. 13
    • Tam, A.C.1    Zapka, W.2    Ziemlich, W.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.