Cleaning of optical surfaces by excimer laser radiation

Applied Surface Science

Volumn 96-98, Issue , 1996, Pages 463-468

  Mann, K ^a   Wolff Rottke, B ^a   Muller F ^a  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COATING TECHNIQUES; ELEMENTARY PARTICLES; EXCIMER LASERS; FILMS; GAS LASERS; MIRRORS; OPTICAL TELESCOPES; ORGANIC POLYMERS; PULSED LASER APPLICATIONS; REMOVAL; ULTRAVIOLET RADIATION;

ALUMINUM MIRROR SURFACES; DUST REMOVAL EFFICIENCY; EFFECT OF PARTICLE REMOVAL; EXCIMER LASER RADIATION; KRYPTON FLUORIDE LASER RADIATION; OPTICAL SURFACES; POLYMER FILM STRIPPING; PULSED ULTRAVIOLET LASER RADIATION; SOLVENT FILM; VERY LARGE TELESCOPE MIRRORS;

SURFACE CLEANING;

EID: 0030562907     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(95)00459-9     Document Type: Article

References (9)

1. K. Mann, F. Müller and B. Wolff-Rottke, UV Laser Cleaning of Very Large Telescope (VLT) Mirrors (European Southern Observatory (ESO), May 1994).
2. E. Hontzopoulos, C. Fotakis and M. Doulgeridis, SPIE 1810 (1992) 784.
3. A.C. Tarn, W.P. Leung, W. Zapka and W. Ziemlich, J. Appl. Phys. 71 (1992) 3515.
4. K. Mann, A. Hopfmüller, H. Gerhardt, P. Gorzellik, R. Schild, W. Stöffler and H. Wagner, Proc. of OE'Technol., Boston (USA), SPIE 1834 (1992) 184.
5. J.D. Kelley, in: Laser Induced Damage in Optical Materials, 1991, SPIE 1624 (1991) 153.
6. P. Giordano and A. Torrejon, in: The ESO Messenger 75 (1994) 9.
7. K. Mann and H. Gerhardt, Proc. of ECO IV, Int. Conf. on Opt. Sci. and Eng., Den Haag, SPIE 1503 (1991) 176.
8. K. Mann, H. Gerhardt, G. Pfeifer and R. Wolf, in: Laser Induced Damage in Optical Materials, 1991, SPIE 1624 (1991) 436.
9. W. Zapka, W. Ziemlich, W.P. Leung and A.C. Tam, Microelectron. Eng. 20 (1993) 171.