Removal versus ablation in KrF dry laser cleaning of polystyrene particles from silicon

Journal of Applied Physics

Volumn 92, Issue 9, 2002, Pages 5159-5162

  Kudryashov, Sergey I ^a   Allen, Susan D ^a  

^a FLORIDA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

248 NM EXCIMER LASER; DIRECT ABSORPTION; DRY LASER CLEANING; FLUENCES; LASER REMOVAL; PARTICLE REMOVAL; POLYSTYRENE PARTICLE; RECOIL MOMENTA; SI SUBSTRATES; SURFACE DAMAGES;

ABLATION; CLEANING; POLYSTYRENES;

SILICON;

EID: 18744367896     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1503854     Document Type: Article

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