Dynamic particle removal by nanosecond dry laser cleaning: Theory

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4426, Issue , 2002, Pages 340-346

  Arnold, Nikita ^a   Schrems, G ^a,b   Muhlberger T ^a   Bertsch, M ^b   Mosbacher, M ^a,b   Leiderer, P ^b   Bauerle D ^a  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

^b UNIVERSITY OF KONSTANZ   (Germany)

Author keywords

Adhesion; Laser cleaning; LPM2001; Modeling; Oscillations; Si; SiO2

Indexed keywords

ADHESION; COMPUTER SIMULATION; EXCIMER LASERS; LASER PULSES; NEODYMIUM LASERS; PARTICLE SIZE ANALYSIS; PARTICLES (PARTICULATE MATTER); SURFACE CLEANING; THERMAL EXPANSION;

LASER CLEANING;

LASER BEAM EFFECTS;

EID: 0036384585     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.456828     Document Type: Article

References (24)

1. W. Zapka, W. Ziemlich, and A.C. Tam, Appl. Phys. Lett. 58 2217 (1991).
2. The national Technology Roadmap for Semiconductors (Semic. Industry Association), San Jose, CA, 116 (1994).
3. rd ed., Springer, Berlin, 2000.
4. S.J. Lee, K. Imen, S.D. Allen Appl.Phys.Lett. 58 203 (1991).
5. M. She, D. Kim and C.P. Grigoropoulos J. Appl. Phys., 86 6519 (1999).
6. R.D. Halfpenny, D.M. Kane, J.Appl.Phys. 86 6641 (1999).
7. V. Dobler, R. Oltra, J.P. Boquillon, M. Mosbacher, J. Boneberg, and P. Leiderer, Appl. Phys. A, 69 335 (1999).
8. Y.F. Lu, W.D. Song, B.W. Ang, M.H. Hong, D.S.H. Chart, T.S. Low, Appl. Phys. A, 65 9 (1997).
9. V.P. Veiko, E.A. Shakhno, in Proc. SPIE, (2001).
10. Y.F. Lu, Y.W. Zheng and W.D. Song, Appl. Phys. A, 68 569 (1999).
11. Y.F. Lu, W.D. Song, M.H. Hong, B.S. Teo, T.C. Chong and T.S. Low, J. Appl. Phys., 80 499 (1996).
12. Al.A. Kolomenskii, H.A. Schuessler, V.G. Mikhalevich and A.A. Maznev, J. Appl. Phys., 84 2404 (1998).
13. Y.F. Lu, Y.W. Zheng, and W.D. Song, J. Appl. Phys., 87 549 (2000).
14. G. Vereecke, E. Röhr, and M.M. Heyns, J. Appl. Phys., 85 3837 (1999).
15. P. Leiderer, J. Boneberg, V. Dobler, M. Mosbacher, H.-J. Münzer, T. Fourrier, G. Schrems, D. Bäuerle, J. Siegel, N. Chaoui, J. Solis, C.N. Afonso, Proc. SPIE 4065 249 (2000).
16. Y.F. Lu, Y.W. Zheng, and W.D. Song, J. Appl. Phys., 87 1534 (2000).
17. L.D. Landau and E.M. Lifshitz, Theory of elasticity, Pergamon Press, New York, 1986, §§6, 7.
18. K.L. Johnson, K. Kendall, and A.D. Roberts, Proc. R. Soc. London Ser. A., 324 301 (1971).
19. B.V. Derjagin, V.M. Muller, and Yu.P. Toropov, J. Colloid Interface Sci., 53 314 (1975).
20. D.E. Gray (ed.), American Institute of Physics Handbook, McGraw-Hill, New York, 1972.
21. A.A. Maznev, J. Hohlfeld, J. Güdde, J.Appl.Phys., 82 5082 (1997).
22. B. Luk'yanchuk, Y.W. Zheng, Y.F. Lu, Proc. SPIE, 4065 576 (2000).
23. L.P. Welsh, J.A. Tuchman, I.P. Herman, J. Appl. Phys., 64 6274 (1988).
24. H.S. Carslaw and J.C. Jaeger, Conduction of Heat in Solids, Oxford Univ. Press, New York, 1959.