Photoacoustic study of KrF laser heating of Si: Implications for laser particle removal

Journal of Applied Physics

Volumn 92, Issue 10, 2002, Pages 5627-5631

  Kudryashov, Sergey I ^a   Allen, Susan D ^a,b  

^a FLORIDA STATE UNIVERSITY   (United States)

^b FAMU FSU COLLEGE OF ENGINEERING   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC GENERATION; COMPRESSION PULSE; DOMINANT MECHANISM; EXPERIMENTAL CONDITIONS; FLUENCES; LASER FLUENCES; LASER PARTICLES; MELTING THRESHOLD; MOLTEN LAYERS; PHOTOACOUSTIC MEASUREMENTS; RAREFACTION PULSE; THERMOACOUSTIC;

HEATING; LASER HEATING; MELTING; MOLTEN MATERIALS; PHOTOACOUSTIC EFFECT; THERMOACOUSTICS;

SILICON;

EID: 0037113013     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1503859     Document Type: Article

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