Laser cleaning of surface contaminants

Applied Surface Science

Volumn 127-129, Issue , 1998, Pages 721-725

  Tam, Andrew C ^a   Park, Hee K ^b   Grigoropoulos, Costas P ^c  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b IBM   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Dry laser cleaning; Steam laser cleaning; Surface contaminants

Indexed keywords

IMPURITIES; LASER PULSES; PARTICLES (PARTICULATE MATTER); PULSED LASER APPLICATIONS; THIN FILMS;

DRY LASER CLEANING; LIQUID FILMS; STEAM LASER CLEANING;

SURFACE CLEANING;

EID: 0032070603     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00788-5     Document Type: Article

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