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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3274, Issue , 1998, Pages 100-109

Transition from laboratory to manufacturing for a dry, laser-assisted cleaning technology

(1) Engelsberg, A C a

a Radiance Services Company (United States)

Author keywords

Dry cleaning; Laser processing; Laser assisted cleaning; Surface preparation

Indexed keywords

DRY CLEANING; PHOTONS; POLISHING; SEMICONDUCTOR MATERIALS;

LASER CLEANING;

LASERS;

CLEANING; LASERS; POLISHING; SEMICONDUCTORS;

EID: 0032226041 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.309499 Document Type: Conference Paper

Times cited : (9)

References (10)

1
- 0027795363
- Pittsburgh, PA, ed. by G. Higashi, G. Irene, and T. Ohmi
- (1993) Proceedings of the Materials Research Society , vol.315 , pp. 255
- Engelsberg, A.C.¹

2
- 84967408175
- May
- (1995) Precision Cleaning Magazine , pp. 35
- Engelsberg, A.C.¹

3
- 0030407871
- Austin, TX, October
- (1996) Proceedings of 19th International Electronics Manufacturing and Technology Symposium , pp. 223
- Engelsberg, A.C.¹ Lizotte, T.² Ohar, O.³ O'Keeffe, T.R.⁴

4
- 0005441729
- San Jose, CA, October
- (1993) Proceedings of Microcontamination 93 , pp. 310
- Engelsberg, A.C.¹

5
- 0005448571
- Redwood City, CA, September
- (1996) Photomasks 96 , pp. 113
- Engelsberg, A.C.¹

6
- 0005469003
- Pittsburgh, PA, ed. R. Singh, D. Norton, L. Laude, J. Narayan, and J. Cheung
- (1995) Proceedings of the Materials, Research Society , vol.397 , pp. 335
- Harvey, E.C.¹ Fletcher, J.² Engelsberg, A.C.³

7
- 0005434557
- Cincinnati, OH, April
- (1997) Proceedings, Precision Cleaning 97 , pp. 544
- Engelsberg, A.C.¹

8
- 0005503812
- reference 3
- Proceedings, Precision Cleaning 97

9
- 0005479117
- ed., R. P. Donavon (New York: Marcel Dekker)
- (1990) Particle Control for Semiconductor Manufacturing , pp. 415
- Fisher, W.G.¹

10
- 0004047657
- reference 7
- Particle Control for Semiconductor Manufacturing

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.