Universal threshold for the steam laser cleaning of submicron spherical particles from silicon

Applied Physics A: Materials Science and Processing

Volumn 70, Issue 6, 2000, Pages 669-672

  Mosbacher, M ^a   Dobler, V ^a   Boneberg, J ^a   Leiderer, P ^a  

^a UNIVERSITY OF KONSTANZ   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; COLLOIDS; DEPOSITION; HELIUM NEON LASERS; LASER APPLICATIONS; NEODYMIUM LASERS; PARTICLES (PARTICULATE MATTER); POLYMERS; SILICA; SILICON;

STEAM LASER CLEANING; SUBMICRON SPHERICAL PARTICLES;

SURFACE CLEANING;

EID: 0034206767     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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