SCOPUS 정보 검색 플랫폼

Applied Physics A: Materials Science and Processing

Volumn 77, Issue 1, 2003, Pages 117-123

Near field induced defects and influence of the liquid layer thickness in steam laser cleaning of silicon wafers

(3) Lang, F a Mosbacher, M a Leiderer, P a

a UNIVERSITY OF KONSTANZ (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CLEANING; COLLOIDS; CRYSTAL DEFECTS; EVAPORATION; GRAIN SIZE AND SHAPE; LASER ABLATION; LASER APPLICATIONS; POLYSTYRENES; SUBSTRATES; THERMAL EXPANSION; VAPORIZATION;

LASER INDUCED EVAPORATION; LIQUID LAYER THICKNESS; STEAM LASER CLEANING;

SILICON WAFERS;

EID: 0038207915 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-003-2101-0 Document Type: Article

Times cited : (47)

References (19)

1
- 0031117209
- O. Yavas, A. Schilling, J. Bischof, J. Boneberg, P. Leiderer: Appl. Phys. A 64, 331 (1997)
- (1997) Appl. Phys. A , vol.64 , pp. 331
- Yavas, O.¹ Schilling, A.² Bischof, J.³ Boneberg, J.⁴ Leiderer, P.⁵

2
- 0001248896
- W. Zapka, W. Ziemlich: Appl. Phys. Lett. 58, 2217 (1991)
- (1991) Appl. Phys. Lett. , vol.58 , pp. 2217
- Zapka, W.¹ Ziemlich, W.²

3
- 36449005632
- K. Imen, J. Lee, S.D. Allen: Appl. Phys. Lett. 58, 203 (1991)
- (1991) Appl. Phys. Lett. , vol.58 , pp. 203
- Imen, K.¹ Lee, J.² Allen, S.D.³

4
- 0001844137
- M. Mosbacher, H.-J. Münzer, J. Zimmermann, J. Solis, J. Boneberg, P. Leiderer: Appl. Phys. A 72, 41 (2001)
- (2001) Appl. Phys. A , vol.72 , pp. 41
- Mosbacher, M.¹ Münzer, H.-J.² Zimmermann, J.³ Solis, J.⁴ Boneberg, J.⁵ Leiderer, P.⁶

5
- 0345253638
- Laser assisted particle removal from silicon wafers
- ed. by K.L. Mital (VSP, Zeist)
- M. Mosbacher, H.-J. Münzer, M. Bertsch, V. Dobler, N. Chaoui, J. Siegel, R. Oltra, D. Bäuerle, J. Boneberg, P. Leiderer: 'Laser Assisted Particle Removal from Silicon Wafers'. In: Particles on Surfaces 7: Detection, Adhesion and Removal, ed. by K.L. Mital (VSP, Zeist 2003)
- (2003) Particles on Surfaces 7: Detection, Adhesion and Removal
- Mosbacher, M.¹ Münzer, H.-J.² Bertsch, M.³ Dobler, V.⁴ Chaoui, N.⁵ Siegel, J.⁶ Oltra, R.⁷ Bäuerle, D.⁸ Boneberg, J.⁹ Leiderer, P.¹⁰

6
- 36448999056
- A.C. Tam, W.P. Leung, W. Zapka, W. Ziemlich: J. Appl. Phys. 71, 3515 (1992)
- (1992) J. Appl. Phys. , vol.71 , pp. 3515
- Tam, A.C.¹ Leung, W.P.² Zapka, W.³ Ziemlich, W.⁴

7
- 0028757082
- H.K. Park, C.P. Grigoropoulos, W.P. Leung, A.C. Tam: IEEE Trans. Compon., Packag., Manuf. Technol. A 17, 631 (1994)
- (1994) IEEE Trans. Compon., Packag., Manuf. Technol. A , vol.17 , pp. 631
- Park, H.K.¹ Grigoropoulos, C.P.² Leung, W.P.³ Tam, A.C.⁴

8
- 0030642943
- S. Boughaba, X. Wu, E. Sacher, M. Meunier: J. Adhes. 61, 293 (1997)
- (1997) J. Adhes. , vol.61 , pp. 293
- Boughaba, S.¹ Wu, X.² Sacher, E.³ Meunier, M.⁴

9
- 0032070603
- A.C. Tam, H.K. Park, C.P. Grigoropoulos: Appl. Surf. Sci. 127-129, 721 (1998)
- (1998) Appl. Surf. Sci. , vol.127-129 , pp. 721
- Tam, A.C.¹ Park, H.K.² Grigoropoulos, C.P.³

10
- 0034206767
- M. Mosbacher, V. Dobler, J. Boneberg, P. Leiderer: Appl. Phys. A 70, 669 (2000)
- (2000) Appl. Phys. A , vol.70 , pp. 669
- Mosbacher, M.¹ Dobler, V.² Boneberg, J.³ Leiderer, P.⁴

11
- 0038202432
- Interfacial Dynamics Corp., Portland, OR, USA
- Interfacial Dynamics Corp., Portland, OR, USA

12
- 0032206846
- Y.F. Lu, Y. Zhang, W.D. Song, D.S.H. Chan: Jpn. J. Appl. Phys. 37, 1330 (1998)
- (1998) Jpn. J. Appl. Phys. , vol.37 , pp. 1330
- Lu, Y.F.¹ Zhang, Y.² Song, W.D.³ Chan, D.S.H.⁴

13
- 0001627604
- X. Wu, E. Sacher, M. Meunier: J. Appl. Phys. 87, 3618 (2000)
- (2000) J. Appl. Phys. , vol.87 , pp. 3618
- Wu, X.¹ Sacher, E.² Meunier, M.³

14
- 0000469962
- K.L. Johnson, K. Kendall, A.D. Robert: Proc. R. Soc. London, Ser. A 324, 301 (1971)
- (1971) Proc. R. Soc. London, Ser. A , vol.324 , pp. 301
- Johnson, K.L.¹ Kendall, K.² Robert, A.D.³

15
- 0003440781
- (Academic Press, London)
- J.N. Israelachvili: Intermolecular and Surface Forces (Academic Press, London 1992)
- (1992) Intermolecular and Surface Forces
- Israelachvili, J.N.¹

16
- 0001567561
- S. Min, K. Dongsik, C.P. Grigoropoulos: J. Appl. Phys. 86, 6519 (1999)
- (1999) J. Appl. Phys. , vol.86 , pp. 6519
- Min, S.¹ Dongsik, K.² Grigoropoulos, C.P.³

17
- 0000203616
- O. Yavas, P. Leiderer, H.K. Park, C.P. Grigoropoulos, C.C. Poon, W.P. Leung, N. Do, A.C. Tam: Phys. Rev. Lett. 70, 1830 (1993)
- (1993) Phys. Rev. Lett. , vol.70 , pp. 1830
- Yavas, O.¹ Leiderer, P.² Park, H.K.³ Grigoropoulos, C.P.⁴ Poon, C.C.⁵ Leung, W.P.⁶ Do, N.⁷ Tam, A.C.⁸

18
- 0035928811
- D. Kim, H.K. Park, C.P. Grigoropoulos: Int. J. Heat Mass Transfer 44, 3843 (2001)
- (2001) Int. J. Heat Mass Transfer , vol.44 , pp. 3843
- Kim, D.¹ Park, H.K.² Grigoropoulos, C.P.³

19
- 0035064291
- H.-J. Münzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer: J. Microsc. 202, 129 (2001)
- (2001) J. Microsc. , vol.202 , pp. 129
- Münzer, H.-J.¹ Mosbacher, M.² Bertsch, M.³ Zimmermann, J.⁴ Leiderer, P.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.