메뉴 건너뛰기




Volumn 93, Issue 7, 2005, Pages 1357-1363

High-performance nanowire electronics and photonics and nanoscale patterning on flexible plastic substrates

Author keywords

Flexible electronics; Light emitting diodes; Nanoimprint lithography (NIL); Nanoscale patterning; Nanowire (NW) transistors; Plastic substrates; Silicon nanowires (NWs)

Indexed keywords

DATA STORAGE EQUIPMENT; FIELD EFFECT TRANSISTORS; LIGHT EMITTING DIODES; LITHOGRAPHY; SINGLE CRYSTALS; SUBSTRATES;

EID: 23244432153     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/JPROC.2005.850308     Document Type: Conference Paper
Times cited : (127)

References (51)
  • 1
    • 23244465559 scopus 로고
    • Silicon wafer process technology: Slicing, etching, polishing
    • A. C. Bonora, "Silicon wafer process technology: Slicing, etching, polishing," in Proc. Electrochemical Soc., vol. 77-2, 1977, pp. 154-169.
    • (1977) Proc. Electrochemical Soc. , vol.77 , Issue.2 , pp. 154-169
    • Bonora, A.C.1
  • 2
    • 0034326045 scopus 로고    scopus 로고
    • Plastic electronics and future trends in microelectronics
    • Nov.
    • J. M. Xu, "Plastic electronics and future trends in microelectronics," Synth. Met., vol. 115, pp. 1-3, Nov. 2000.
    • (2000) Synth. Met. , vol.115 , pp. 1-3
    • Xu, J.M.1
  • 3
    • 23244446061 scopus 로고
    • From bulk crystalline age to multilayered thin film age - A technological evolution from micro- to macroelectronics
    • Jan.
    • Y. Hamakawa, "From bulk crystalline age to multilayered thin film age - A technological evolution from micro- to macroelectronics," Sens. Mater., vol. 3, no. 1, pp. 9-23, Jan. 1991.
    • (1991) Sens. Mater. , vol.3 , Issue.1 , pp. 9-23
    • Hamakawa, Y.1
  • 5
    • 0034695676 scopus 로고    scopus 로고
    • New age semiconductors pick up the pace
    • Jan.
    • R. F. Service, "New age semiconductors pick up the pace," Science, vol. 287, pp. 415-417, Jan. 2000.
    • (2000) Science , vol.287 , pp. 415-417
    • Service, R.F.1
  • 6
    • 0036868980 scopus 로고    scopus 로고
    • Low-temperature polycrystalline silicon thin-film transistor technologies for system-on-glass displays
    • Nov.
    • S. Uchikoga, "Low-temperature polycrystalline silicon thin-film transistor technologies for system-on-glass displays," MRS Bull., vol. 27, pp. 881-885, Nov. 2002.
    • (2002) MRS Bull. , vol.27 , pp. 881-885
    • Uchikoga, S.1
  • 7
    • 0033707616 scopus 로고    scopus 로고
    • Electronic displays for information technology
    • May
    • R. L. Wisnieff and J. J. Ritsko, "Electronic displays for information technology," IBM J. Res. Develop., vol. 44, no. 3, pp. 409-422, May 2000.
    • (2000) IBM J. Res. Develop. , vol.44 , Issue.3 , pp. 409-422
    • Wisnieff, R.L.1    Ritsko, J.J.2
  • 8
    • 0035022043 scopus 로고    scopus 로고
    • Organic electronics: Introduction
    • Jan.
    • J. M. Shaw and P. F. Seidler, "Organic electronics: Introduction," IBM J. Res. Develop., vol. 45, no. 1, pp. 3-9, Jan. 2001.
    • (2001) IBM J. Res. Develop. , vol.45 , Issue.1 , pp. 3-9
    • Shaw, J.M.1    Seidler, P.F.2
  • 9
    • 0038668782 scopus 로고    scopus 로고
    • Electronic paper: Flexible active-matrix electronic ink display
    • May
    • Y. Chen et al., "Electronic paper: Flexible active-matrix electronic ink display," Nature, vol. 423, pp. 136-136, May 2003.
    • (2003) Nature , vol.423 , pp. 136-136
    • Chen, Y.1
  • 10
    • 0037088513 scopus 로고    scopus 로고
    • High-performance polycrystalline silicon thin film transistors on nonalkali glass produced using continuous wave laser lateral crystallization
    • Mar.
    • A. Hara et al., "High-performance polycrystalline silicon thin film transistors on nonalkali glass produced using continuous wave laser lateral crystallization," Jpn. J. Appl. Phys., pt. 2, vol. 41, no. 3B, pp. L311-L313, Mar. 2002.
    • (2002) Jpn. J. Appl. Phys., Pt. 2 , vol.41 , Issue.3 B
    • Hara, A.1
  • 11
    • 0035942286 scopus 로고    scopus 로고
    • Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks
    • Apr.
    • J. A. Rogers et al., "Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks," Proc. Nat. Acad. Sci. USA, vol. 98, no. 9, pp. 4835-4840, Apr. 2001.
    • (2001) Proc. Nat. Acad. Sci. USA , vol.98 , Issue.9 , pp. 4835-4840
    • Rogers, J.A.1
  • 12
    • 0034672078 scopus 로고    scopus 로고
    • High-resolution inkjet printing of all-polymer transistor circuits
    • Dec.
    • H. Sirringhaus et al., "High-resolution inkjet printing of all-polymer transistor circuits," Science, vol. 290, pp. 2123-2126, Dec. 2000.
    • (2000) Science , vol.290 , pp. 2123-2126
    • Sirringhaus, H.1
  • 13
    • 0035025694 scopus 로고    scopus 로고
    • Organic thin-film transistors: A review of recent advances
    • Jan.
    • C. D. Dimitrakopoulos and D. J. Mascaro, "Organic thin-film transistors: A review of recent advances," IBM J. Res. Develop., vol. 45, no.1, pp. 11-27, Jan. 2001.
    • (2001) IBM J. Res. Develop. , vol.45 , Issue.1 , pp. 11-27
    • Dimitrakopoulos, C.D.1    Mascaro, D.J.2
  • 14
    • 0038781397 scopus 로고    scopus 로고
    • Nanoscale science and technology: Building a big future from small things
    • Jul.
    • C. M. Lieber, "Nanoscale science and technology: Building a big future from small things," MRS Bull., vol. 28, pp. 486-491, Jul. 2003.
    • (2003) MRS Bull. , vol.28 , pp. 486-491
    • Lieber, C.M.1
  • 15
    • 0038161696 scopus 로고    scopus 로고
    • High performance silicon nanowires field effect transistors
    • Jan.
    • Y. Cui, Z. Zhong, D. Wang, W. U. Wang, and C. M. Lieber, "High performance silicon nanowires field effect transistors," Nano Lett., vol. 3, no. 2, pp. 149-152, Jan. 2003.
    • (2003) Nano Lett. , vol.3 , Issue.2 , pp. 149-152
    • Cui, Y.1    Zhong, Z.2    Wang, D.3    Wang, W.U.4    Lieber, C.M.5
  • 16
    • 0000823384 scopus 로고    scopus 로고
    • Gallium nitride nanowire nanodevices
    • Jan.
    • Y. Huang, X. Duan, Y. Cui, and C. M. Lieber, "Gallium nitride nanowire nanodevices," Nano Lett., vol. 2, no. 2, pp. 101-104, Jan. 2002.
    • (2002) Nano Lett. , vol.2 , Issue.2 , pp. 101-104
    • Huang, Y.1    Duan, X.2    Cui, Y.3    Lieber, C.M.4
  • 17
    • 0035834415 scopus 로고    scopus 로고
    • Logic gates and computation from assembled nanowires building blocks
    • Nov.
    • Y. Huang et al., "Logic gates and computation from assembled nanowires building blocks," Science, vol. 294, pp. 1313-1317, Nov. 2001.
    • (2001) Science , vol.294 , pp. 1313-1317
    • Huang, Y.1
  • 18
    • 0035804248 scopus 로고    scopus 로고
    • Indium phosphide nanowires as building blocks for nanoscale electronic and optoelectronic devices
    • Jan.
    • X. Duan, Y. Huang, Y. Cui, J. Wang, and C. M. Lieber, "Indium phosphide nanowires as building blocks for nanoscale electronic and optoelectronic devices," Nature, vol. 409, pp. 66-69, Jan. 2001.
    • (2001) Nature , vol.409 , pp. 66-69
    • Duan, X.1    Huang, Y.2    Cui, Y.3    Wang, J.4    Lieber, C.M.5
  • 19
    • 0035902938 scopus 로고    scopus 로고
    • Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species
    • Aug.
    • Y. Cui, Q. Wei, H. Park, and C. M. Lieber, "Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species," Science, vol. 293, pp. 1289-1292, Aug. 2001.
    • (2001) Science , vol.293 , pp. 1289-1292
    • Cui, Y.1    Wei, Q.2    Park, H.3    Lieber, C.M.4
  • 20
    • 0348112526 scopus 로고    scopus 로고
    • High-performance nanowires electronics and photonics on glass and plastic substrates
    • Oct.
    • M. C. McAlpine et al., "High-performance nanowires electronics and photonics on glass and plastic substrates," Nano Lett., vol. 3, no. 11, pp. 1531-1535, Oct. 2003.
    • (2003) Nano Lett. , vol.3 , Issue.11 , pp. 1531-1535
    • McAlpine, M.C.1
  • 21
    • 0141674950 scopus 로고    scopus 로고
    • Nanoimprint lithography for hybrid plastic electronics
    • Mar.
    • M. C. McAlpine, R. S. Friedman, and C. M. Lieber, "Nanoimprint lithography for hybrid plastic electronics," Nano Lett., vol. 3, no. 4, pp. 443-445, Mar. 2003.
    • (2003) Nano Lett. , vol.3 , Issue.4 , pp. 443-445
    • McAlpine, M.C.1    Friedman, R.S.2    Lieber, C.M.3
  • 22
    • 0035462097 scopus 로고    scopus 로고
    • Nanofabrication: The art of building small
    • Sep.
    • G. M. Whitesides and J. C. Love, "Nanofabrication: The art of building small," Sci. Am., pp. 38-47, Sep. 2001.
    • (2001) Sci. Am. , pp. 38-47
    • Whitesides, G.M.1    Love, J.C.2
  • 23
    • 0030570065 scopus 로고    scopus 로고
    • Imprint lithography with 25-nanometer resolution
    • Apr.
    • S. Y. Chou, P. R. Krauss, and P. J. Renstrom, "Imprint lithography with 25-nanometer resolution," Science, vol. 272, pp. 85-87, Apr. 1996.
    • (1996) Science , vol.272 , pp. 85-87
    • Chou, S.Y.1    Krauss, P.R.2    Renstrom, P.J.3
  • 24
    • 0034315130 scopus 로고    scopus 로고
    • Nanoimprint lithography at the 6 in. wafer scale
    • Nov./Dec.
    • B. Heidari, I. Maximov, and L. Montelius, "Nanoimprint lithography at the 6 in. wafer scale," J. Vac. Sci. Technol. B, vol. 18, no. 6, pp. 3557-3560, Nov./Dec. 2000.
    • (2000) J. Vac. Sci. Technol. B , vol.18 , Issue.6 , pp. 3557-3560
    • Heidari, B.1    Maximov, I.2    Montelius, L.3
  • 25
    • 0035927018 scopus 로고    scopus 로고
    • Direct three-dimensional patterning using nanoimprint lithography
    • May
    • M. Li, L. Chen, and S. Y. Chou, "Direct three-dimensional patterning using nanoimprint lithography," Appl. Phys. Lett., vol. 78, no. 21, pp. 3322-3324, May 2001.
    • (2001) Appl. Phys. Lett. , vol.78 , Issue.21 , pp. 3322-3324
    • Li, M.1    Chen, L.2    Chou, S.Y.3
  • 28
    • 0141769693 scopus 로고    scopus 로고
    • Carbon nanotube inter- And intramolecular logic gates
    • Sep.
    • V. Derycke, R. Martel, J. Appenzeller, and P. Avouris, "Carbon nanotube inter- and intramolecular logic gates," Nano Lett., vol. 1, no. 9, pp. 453-456, Sep. 2001.
    • (2001) Nano Lett. , vol.1 , Issue.9 , pp. 453-456
    • Derycke, V.1    Martel, R.2    Appenzeller, J.3    Avouris, P.4
  • 29
    • 0035450338 scopus 로고    scopus 로고
    • Multistep profiles by mix and match of nanoimprint and UV lithography
    • Sep.
    • K. Pfeiffer et al., "Multistep profiles by mix and match of nanoimprint and UV lithography," Microelectron. Eng., vol. 57-58, pp. 381-387, Sep. 2001.
    • (2001) Microelectron. Eng. , vol.57-58 , pp. 381-387
    • Pfeiffer, K.1
  • 31
    • 0000471892 scopus 로고    scopus 로고
    • Protein tubule immobilization on self-assembled monolayers on Au substrates
    • Aug.
    • H. Matsui, P. Porrata, and G. E. Douberly Jr, "Protein tubule immobilization on self-assembled monolayers on Au substrates," Nano Lett., vol. 1, no. 9, pp. 461-464, Aug. 2001.
    • (2001) Nano Lett. , vol.1 , Issue.9 , pp. 461-464
    • Matsui, H.1    Porrata, P.2    Douberly Jr., G.E.3
  • 32
    • 0034824859 scopus 로고    scopus 로고
    • Directed assembly of one-dimensional nanostructures into functional networks
    • Jan.
    • Y. Huang, X. Duan, Q. Wei, and C. M. Lieber, "Directed assembly of one-dimensional nanostructures into functional networks," Science, vol. 291, pp. 630-633, Jan. 2001.
    • (2001) Science , vol.291 , pp. 630-633
    • Huang, Y.1    Duan, X.2    Wei, Q.3    Lieber, C.M.4
  • 33
    • 0005836651 scopus 로고    scopus 로고
    • Single-and multiwall carbon nanotube field-effect transistors
    • Aug.
    • R. Martel, T. Schmidt, H. R. Shea, T. Hertel, and P. Avouris, "Single-and multiwall carbon nanotube field-effect transistors," Appl. Phys. Lett., vol. 73, no. 17, pp. 2447-2449, Aug. 1998.
    • (1998) Appl. Phys. Lett. , vol.73 , Issue.17 , pp. 2447-2449
    • Martel, R.1    Schmidt, T.2    Shea, H.R.3    Hertel, T.4    Avouris, P.5
  • 35
    • 0036386063 scopus 로고    scopus 로고
    • Excimer laser crystallized poly-Si TFT's on plastic substrates
    • D. P. Gosain, "Excimer laser crystallized poly-Si TFT's on plastic substrates," Proc. SPIE, vol. 4426, pp. 394-100, 2002.
    • (2002) Proc. SPIE , vol.4426 , pp. 394-1100
    • Gosain, D.P.1
  • 36
    • 0036531038 scopus 로고    scopus 로고
    • Amorphous-silicon thin-film transistors deposited by VHF-PECVD and hot-wire CVD
    • Apr.
    • B. Stannowski, R. E. I. Schropp, R. B. Wehrspohn, and M. J. Powell, "Amorphous-silicon thin-film transistors deposited by VHF-PECVD and hot-wire CVD," J. Non-Crystal. Solids, vol. 299-302, pp. 1340-1344, Apr. 2002.
    • (2002) J. Non-Crystal. Solids , vol.299-302 , pp. 1340-1344
    • Stannowski, B.1    Schropp, R.E.I.2    Wehrspohn, R.B.3    Powell, M.J.4
  • 37
    • 0036532050 scopus 로고    scopus 로고
    • Jet-printed fabrication of a-Si: H thin-film transistors and arrays
    • Apr.
    • W. S. Wong et al., "Jet-printed fabrication of a-Si: H thin-film transistors and arrays," J. Non-Cryst. Solids, vol. 299-302, pp. 1335-1339, Apr. 2002.
    • (2002) J. Non-Cryst. Solids , vol.299-302 , pp. 1335-1339
    • Wong, W.S.1
  • 38
    • 0000602692 scopus 로고    scopus 로고
    • 150 °C amorphous silicon thin-film transistor technology for polyimide substrates
    • May
    • H. Gleskova, S. Wagner, V. Gasparik, and P. Kovac, "150 °C amorphous silicon thin-film transistor technology for polyimide substrates," J. Electrochem. Soc., vol. 148, no. 7, pp. G370-G374, May 2001.
    • (2001) J. Electrochem. Soc. , vol.148 , Issue.7
    • Gleskova, H.1    Wagner, S.2    Gasparik, V.3    Kovac, P.4
  • 39
    • 79955999145 scopus 로고    scopus 로고
    • Thin-film transistor circuits on large-area spherical surfaces
    • Jul.
    • P. I. Hsu et al., "Thin-film transistor circuits on large-area spherical surfaces,"Appl. Phys. Lett., vol. 81, no. 9, pp. 1723-1725, Jul. 2002.
    • (2002) Appl. Phys. Lett. , vol.81 , Issue.9 , pp. 1723-1725
    • Hsu, P.I.1
  • 40
    • 0037016210 scopus 로고    scopus 로고
    • Polymer gate dielectrics and conducting-polymer contacts for high-performance organic thin-film transistors
    • Dec.
    • M. Halik et al., "Polymer gate dielectrics and conducting-polymer contacts for high-performance organic thin-film transistors," Adv. Mater., vol. 14, no. 23, pp. 1717-1722, Dec. 2002.
    • (2002) Adv. Mater. , vol.14 , Issue.23 , pp. 1717-1722
    • Halik, M.1
  • 41
    • 0038504996 scopus 로고    scopus 로고
    • Pentacene organic transistors and ring oscillators on glass and on flexible polymeric substrates
    • Apr.
    • H. Klauk et al., "Pentacene organic transistors and ring oscillators on glass and on flexible polymeric substrates," Appl. Phys. Lett., vol. 82, no. 23, pp. 4175-4177, Apr. 2003.
    • (2003) Appl. Phys. Lett. , vol.82 , Issue.23 , pp. 4175-4177
    • Klauk, H.1
  • 42
    • 0037210819 scopus 로고    scopus 로고
    • All-organic thin-film transistors using photoacryl as a gate insulator
    • Jan.
    • Y.-M. Kim et al., "All-organic thin-film transistors using photoacryl as a gate insulator," Opt. Mater., vol. 21, pp. 425-428, Jan. 2003.
    • (2003) Opt. Mater. , vol.21 , pp. 425-428
    • Kim, Y.-M.1
  • 43
    • 0037245896 scopus 로고    scopus 로고
    • Pentacene thin film transistors on inorganic dielectrics: Morphology, structural properties, and electronic transport
    • Jan.
    • D. Knipp, R. A. Street, A. Völkel, and J. Ho, "Pentacene thin film transistors on inorganic dielectrics: Morphology, structural properties, and electronic transport," J. Appl. Phys., vol. 93, no. 1, pp. 347-355, Jan. 2003.
    • (2003) J. Appl. Phys. , vol.93 , Issue.1 , pp. 347-355
    • Knipp, D.1    Street, R.A.2    Völkel, A.3    Ho, J.4
  • 44
    • 2642552870 scopus 로고    scopus 로고
    • Scalable interconnection and integration of nanowires devices without registration
    • Apr.
    • S. Jin et al., "Scalable interconnection and integration of nanowires devices without registration," Nano Lett., vol. 4, no. 5, pp. 915-919, Apr. 2004.
    • (2004) Nano Lett. , vol.4 , Issue.5 , pp. 915-919
    • Jin, S.1
  • 45
    • 0004266734 scopus 로고
    • Cambridge, U.K.: Cambridge Univ. Press
    • P. Horowitz and W. Hill, The Art of Electronics. Cambridge, U.K.: Cambridge Univ. Press, 1989, pp. 153-1.
    • (1989) The Art of Electronics , pp. 153-161
    • Horowitz, P.1    Hill, W.2
  • 46
    • 0000018130 scopus 로고    scopus 로고
    • Low-voltage 0.1 μm organic transistors and complementary inverter circuits fabricated with a low-cost form of near-field photolithography
    • Jun.
    • J. A. Rogers, A. Dodabalapur, Z. Bao, and H. E. Katz, "Low-voltage 0.1 μm organic transistors and complementary inverter circuits fabricated with a low-cost form of near-field photolithography," Appl. Phys. Lett., vol. 75, no. 7, pp. 1010-1012, Jun. 1999.
    • (1999) Appl. Phys. Lett. , vol.75 , Issue.7 , pp. 1010-1012
    • Rogers, J.A.1    Dodabalapur, A.2    Bao, Z.3    Katz, H.E.4
  • 47
    • 0008164084 scopus 로고    scopus 로고
    • High-performance all-polymer integrated circuits
    • Jul.
    • G. H. Gelinck, T. C. T. Geuns, and D. M. de Leeuw, "High-performance all-polymer integrated circuits," Appl. Phys. Lett., vol. 77, no. 10, pp. 1487-1489, Jul. 2000.
    • (2000) Appl. Phys. Lett. , vol.77 , Issue.10 , pp. 1487-1489
    • Gelinck, G.H.1    Geuns, T.C.T.2    De Leeuw, D.M.3
  • 48
    • 0043143147 scopus 로고    scopus 로고
    • Synthesis of p-type gallium nitride nanowires for electronic and photonic nanodevices
    • Feb.
    • Z. Zhong, F. Qian, D. Wang, and C. M. Lieber, "Synthesis of p-type gallium nitride nanowires for electronic and photonic nanodevices," Nano Lett., vol. 3, no. 3, pp. 343-346, Feb. 2003.
    • (2003) Nano Lett. , vol.3 , Issue.3 , pp. 343-346
    • Zhong, Z.1    Qian, F.2    Wang, D.3    Lieber, C.M.4
  • 49
    • 9444296051 scopus 로고    scopus 로고
    • Organic electroluminescent devices
    • Aug.
    • J. R. Sheats et al., "Organic electroluminescent devices," Science, vol. 273, pp. 884-888, Aug. 1996.
    • (1996) Science , vol.273 , pp. 884-888
    • Sheats, J.R.1
  • 50
    • 0035019925 scopus 로고    scopus 로고
    • Microdisplays based upon organic light-emitting diodes
    • Jan.
    • W. E. Howard and O. F. Prache, "Microdisplays based upon organic light-emitting diodes," IBM J. Res. Dev., vol. 45, no. 1, pp. 115-127, Jan. 2001.
    • (2001) IBM J. Res. Dev. , vol.45 , Issue.1 , pp. 115-127
    • Howard, W.E.1    Prache, O.F.2
  • 51
    • 20844455924 scopus 로고    scopus 로고
    • High-speed integrated nanowire circuits
    • Apr. submitted for publication
    • R. S. Friedman, M. C. McAlpine, D. S. Ricketts, D. Ham, and C. M. Lieber, "High-speed integrated nanowire circuits," Nature, vol. 434, p. 1085, Apr. 2005, submitted for publication.
    • (2005) Nature , vol.434 , pp. 1085
    • Friedman, R.S.1    McAlpine, M.C.2    Ricketts, D.S.3    Ham, D.4    Lieber, C.M.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.