Polymer bonding process for nanolithography

Applied Physics Letters

Volumn 79, Issue 14, 2001, Pages 2246-2248

  Borzenko, T ^a   Tormen, M ^a   Schmidt, G ^a   Molenkamp, L W ^a   Janssen, H ^b  

^a UNIVERSITY OF WÜRZBURG   (Germany)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035473576     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1406561     Document Type: Article

References (13)

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