Thin-film transistor circuits on large-area spherical surfaces

Applied Physics Letters

Volumn 81, Issue 9, 2002, Pages 1723-1725

  Hsu, P I ^a   Bhattacharya, R ^a   Gleskova, H ^a   Huang, M ^a   Xi, Z ^a   Suo, Z ^a   Wagner, S ^a   Sturm, J C ^a  

^a Princeton University ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON (A-SI:H); ARBITRARY SHAPE; COMPLIANT SUBSTRATES; DESIGN RULES; INVERTER CIRCUIT; MAXIMUM VALUES; PHOTORESIST PATTERNS; SPHERICAL DOMES; SPHERICAL SURFACE;

AMORPHOUS FILMS; AMORPHOUS SILICON; DEFORMATION; DOMES; PHOTORESISTS; SEMICONDUCTING ORGANIC COMPOUNDS; SUBSTRATES; TENSILE STRAIN; THIN FILM CIRCUITS;

THIN FILM TRANSISTORS;

EID: 79955999145     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1502199     Document Type: Article

References (13)

1. E. Y. Ma and S. Wagner, Mater. Res. Soc. Symp. Proc. 508, 13 (1998). mrs MRSPDH 0272-9172
2. A. Constant, S. G. Burns, H. Shanks, C. Gruber, A. Landin, D. Schmidt, C. Thielen, F. Olympie, T. Schumacher, and J. Cobbs, Electrochem. Soc. Proc. 94-35, 392 (1994). pes PESODO 0161-6374
3. D. B. Thomasson, M. Bonse, J. R. Huang, C. R. Wronski, and T. N. Jackson, Tech. Dig. Int. Electron Devices Meet., 253 (1998).
4. P. Mach, S. J. Rodriguez, R. Nortrup, P. Wiltzius, and J. A. Rogers, Appl. Phys. Lett. 78, 3592 (2000). apl APPLAB 0003-6951
5. H. Gleskova, S. Wagner, and Z. Suo, J. Non-Cryst. Solids 266-269, 1320 (2000). jnc JNCSBJ 0022-3093
6. I. Sample, New Sci. 170, 23 (2001). nes NWSCAL 0262-4079
7. P. I. Hsu, M. Huang, S. Wagner, Z. Suo, and J. C. Sturm, Mater. Res. Soc. Symp. Proc. 621, Q8.6.1 (2000). mrs MRSPDH 0272-9172
8. H. Gleskova, S. Wagner, V. Gasparìk, and P. Kovác, J. Electrochem. Soc. 148, G370 (2001). jes JESOAN 0013-4651
9. F. Jansen and M. A. Machonkin, J. Vac. Sci. Technol. A 6, 1696 (1988). jva JVTAD6 0734-2101
10. J. A. Kreuz, S. N. Milligan, and R. F. Sutton, DuPont Films Technical Paper No. 3/94, Reorder No. H54504.
11. DuPont Films Technical Paper No. 8/97, Reorder No. H-38492-2.
12. H. Gleskova and S. Wagner, Appl. Phys. Lett. 79, 3347 (2001). apl APPLAB 0003-6951
13. R. Bhattacharya, P. I. Hsu, J. C. Sturm, and S. Wagner, presented at the Materials Research Society Spring Meeting Symposium Z, San Francisco, CA (2001).