The formation of clusters and nanocrystals in Er-implanted hexagonal silicon carbide

Microscopy and Microanalysis

Volumn 10, Issue 2, 2004, Pages 301-310

  Kaiser, U ^a   Muller, D A ^b   Chuvilin, A ^c   Pasold, G ^a   Witthuhn, W ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b LUCENT TECHNOLOGIES   (United States)

^c BORESKOV INSTITUTE OF CATALYSIS   (Russian Federation)

Author keywords

Atomic resolution HAADF STEM; EELS; Er implantation; ErSi2 nanocrystals; High resolution TEM; Silicon carbide

Indexed keywords

INORGANIC COMPOUND; SILICON CARBIDE; SILICON DERIVATIVE;

CHEMISTRY; CONFERENCE PAPER; CRYSTALLIZATION; ELECTRON MICROSCOPY; IMAGE PROCESSING; TOOTH IMPLANTATION;

CARBON COMPOUNDS, INORGANIC; CRYSTALLIZATION; DENTAL IMPLANTS; IMAGE PROCESSING, COMPUTER-ASSISTED; MICROSCOPY, ELECTRON; SILICON COMPOUNDS;

EID: 2142795905     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927604040449     Document Type: Conference Paper

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