An electron spectroscopy study of a-C:H films produced by PACVD in a CH4-CO2 gas mixture

Surface Science

Volumn 586, Issue 1-3, 2005, Pages 96-108

  Calliari, L ^a   Filippi, M ^a   Gottardi, G ^a   Laidani, N ^a   Anderle, M ^a  

^a ITC IRST   (Italy)

Author keywords

Auger electron spectroscopy; Electron energy loss spectroscopy; Hydrogenated amorphous carbon films; Surface structure; UV photoelectron spectroscopy; X ray photoelectron spectroscopy

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON TRANSITIONS; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE STRUCTURE; ULTRAVIOLET RADIATION; ULTRAVIOLET SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY; X RAYS;

HYDROGENATED AMORPHOUS CARBON FILMS; PULSED BIAS VOLTAGE; TETRAHEDRAL BONDS; UV PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS FILMS;

EID: 20444475663     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2005.05.002     Document Type: Article

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