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Diamond and Related Materials

Volumn 13, Issue 1, 2004, Pages 106-110

Characteristics of excess carbon in PACVD TiC-amorphous carbon layers

(7) Liepack, H a Bartsch, K a Arnold, B a Bauer, H D a Liu, X a Knupfer, M a Leonhardt, A a

a IFW DRESDEN (Germany)

Author keywords

Amorphous carbon; Coatings; Microstructure; Plasma CVD

Indexed keywords

CARBON; COMPOSITE MATERIALS; ELECTRON ENERGY LOSS SPECTROSCOPY; HIGH RESOLUTION ELECTRON MICROSCOPY; TITANIUM CARBIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

BINDING STATES;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

CHEMICAL VAPOR DEPOSITION;

EID: 1642440290 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2003.09.007 Document Type: Article

Times cited : (13)

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