Determination of the sp3/sp2 ratio of a-C:H by XPS and XAES

Journal of Non-Crystalline Solids

Volumn 254, Issue 1-3, 1999, Pages 156-160

  Leung, T Y ^a   Man, W F ^a   Lim, P K ^a   Chan, W C ^b   Gaspari, F ^b   Zukotynski, S ^b  

^a HONG KONG BAPTIST UNIVERSITY   (Hong Kong)

^b UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BORON; CARBON; CHEMICAL BONDS; DEPOSITION; DOPING (ADDITIVES); ELECTRON ENERGY LEVELS; HYDROGENATION; IMPURITIES; PHOSPHORUS; SEMICONDUCTING FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS HYDROGENATED CARBON; DIAMOND LIKE CARBON (DLC); X RAY EXCITED AUGER ELECTRON SPECTROSCOPY (XAES);

AMORPHOUS FILMS;

EID: 0032638360     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(99)00388-9     Document Type: Article

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