Thermal effects on structural properties of diamond-like carbon films prepared by pulsed laser deposition

Thin Solid Films

Volumn 467, Issue 1-2, 2004, Pages 98-103

  Nakazawa, H ^a   Yamagata, Y ^a   Suemitsu, M ^b   Mashita, M ^a  

^a HIROSAKI UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Diamond like carbon; Pulsed laser deposition; Raman scattering; X ray photoelectron spectroscopy

Indexed keywords

DEPOSITION TEMPERATURE; DIAMOND-LIKE CARBON; LASER REPETITION; REPETITION RATE;

ANNEALING; CHEMICAL BONDS; EXCIMER LASERS; PULSED LASER DEPOSITION; RAMAN SCATTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND LIKE CARBON FILMS;

EID: 4444251603     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.03.013     Document Type: Article

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