Amorphous carbon films PACVD in CH4-CO2 under pulsed and continuous substrate bias conditions

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 1031-1035

  Gottardi, G ^a   Laidani, N ^a   Bartali, R ^a   Filippi, M ^a   Calliari, L ^a   Brusa, R S ^b   Mariazzi, S ^b   MacChi, C ^b   Anderle, M ^a  

^a ITC IRST   (Italy)

^b UNIVERSITY OF TRENTO   (Italy)

Author keywords

Amorphous hydrogenated carbon; Bias growth; Hardness; Plasma CVD

Indexed keywords

ADHESION; CARBON; ELECTRIC POTENTIAL; FILM GROWTH; HARDNESS; HYDROGENATION; ION BOMBARDMENT; METHANE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES;

AMORPHOUS CARBON FILMS; AMORPHOUS HYDROGENATED CARBON; BIAS GROWTH; PLASMA CVD;

AMORPHOUS FILMS;

EID: 18444391259     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.10.016     Document Type: Conference Paper

References (18)

1. J. Robertson Diamond Relat. Mater. 4 1993 361
2. J. Robertson Mater. Sci. Eng., R Rep. 37 2002 129
3. C. Hopf, A. von Keudell, and W. Jacob Diamond Relat. Mater. 12 2003 85
4. A. von Keudell, M. Meier, and C. Hopf Diamond Relat. Mater. 11 2002 969
5. G. Gottardi, N. Laidani, M. Anderle, R.S. Brusa, and M. Spagolla 16th Int. Symp. Plasma Chem. Proc. 2003 Po8.14
6. A. Zecca, M. Bettonte, J. Paridaens, G.P. Karwasz, and R.S. Brusa Meas. Sci. Technol. 9 1998 1
7. R.S. Brusa, G.P. Karwasz, N. Tiengo, A. Zecca, F. Corni, G. Ottaviani, and R. Tonini Phys. Rev., B 61 2000 10154
8. L. Calliari, M. Filippi, and N. Laidani Surf. Interface Anal. 36 2004 1126
9. W.C. Oliver, and G.M. Pharr J. Mater. Res. 7 1992 1564
10. A. Bubenzer, B. Dischler, G. Brandt, and P. Koidl J. Appl. Phys. 54 1983 4590
11. J.W.A.M. Gielen, M.C.M. van de Sanden, and D.C. Schram Thin Solid Films 271 1995 56
12. M. Veres, M. Koos, and I. Pocsik Diamond Relat. Mater. 11 2002 1110
13. M.J. Paterson Diamond Relat. Mater. 5 1996 1407
14. J. Fink, T. Müller-Heinzerling, J. Pflüger, B. Scheerer, B. Dischler, P. Koidl, A. Bubenzer, and R.E. Sah Phys. Rev., B 30 8 1984 4713
15. A. LiBassi, A.C. Ferrari, V. Stolojan, B.K. Tanner, J. Robertson, and L.M. Brown Diamond Relat. Mater. 9 2000 771
16. A.C. Ferrari, A. Libassi, B.K. Tanner, V. Stolojan, J. Yuan, L.M. Brown, S.E. Rodil, B. Kleinsorge, and J. Robertson Phys. Rev., B 62 16 2000 11089
17. J.L. Andùjar, M. Vives, C. Corbella, and E. Bertran Diamond Relat. Mater. 12 2003 98
18. A.C. Ferrari, S.E. Rodil, J. Robertson, and W.I. Milne Diamond Relat. Mater. 11 2002 994