The next generation of RET

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5645, Issue , 2005, Pages 1-13

  Schellenberg, Franklin M ^a  

^a MENTOR GRAPHICS CORPORATION   (United States)

Author keywords

DFM; OAI; OPC; Phase shifting; Polarization; Resolution; Resolution Enhancement; RET

Indexed keywords

DESIGN FOR MANUFACTURING (DFM); OAI; OPC; RESOLUTION ENHANCEMENT TECHNIQUES (RET);

ALGORITHMS; INTEGRATED CIRCUIT MANUFACTURE; LENSES; NONLINEAR OPTICS; OPTICAL RESOLVING POWER; SILICON WAFERS;

PHOTOLITHOGRAPHY;

EID: 20044366230     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.577222     Document Type: Conference Paper

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