XPS, AES, and EELS characterization of nitrogen-containing thin films

Journal of Electron Spectroscopy and Related Phenomena

Volumn 135, Issue 1, 2004, Pages 27-39

  Soto, G ^a,b   De La Cruz, W ^a   Farias M H ^a  

^a CENTRO DE CIENCIAS DE LA MATERIA CONDENSADA   (Mexico)

^b UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

AES; AES peak structure; EELS; Nitrides; PLD; XPS

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BINDING ENERGY; CHEMICAL BONDS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON TRANSITIONS; ENERGY DISSIPATION; FILM GROWTH; NITRIDES; PULSED LASER DEPOSITION; SYNTHESIS (CHEMICAL); ULTRAHIGH VACUUM; X RAY PHOTOELECTRON SPECTROSCOPY;

AUGER ELECTRON SPECTROSCOPIC (AES) PEAK STRUCTURE; ION PUMPS;

THIN FILMS;

EID: 1842455704     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elspec.2003.12.004     Document Type: Article

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