Effect of deposition conditions on internal stresses and microstructure of reactively sputtered tungsten nitride films

Surface and Coatings Technology

Volumn 127, Issue 2-3, 2000, Pages 238-245

  Shen, Y G ^a   Mai, Y W ^a  

^a Ctr for Adv Materials Technology   (Australia)

Author keywords

Microstructure; Reactive magnetron sputtering; Stress; Thin films; Tungsten nitride

Indexed keywords

EID: 1842582582     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0257-8972(00)00664-2     Document Type: Article

References (20)

1. Toth L.E. Transition Metal Carbides and Nitrides. 1971;Academic, New York.
2. Marcus S.D., Foster R.F. Thin Solid Films. 263:1993;330.
3. Chang K.M., Yeh T.H., Deng I.C. J. Appl. Phys. 81:1997;3670.
4. Tsai M.H., Sun S.C., Chiu H.T., Chuang S.H. Appl. Phys. Lett. 68:1996;1412.
5. Kim Y.T., Lee C.W., Min S.K., Park Y.W. Appl. Phys. Lett. 61:1992;537.
6. Yu K.M., Jaklevic J.M., Haller E.E., Cheung S.K., Kwok S.P. J. Appl. Phys. 64:1988;1284.
7. Huber K.J., Aita C.R. J. Vac. Sci. Technol. A. 6:1988;1717.
8. So F.C.T., Kolawa E., Zhao X.A., Pan E.T.S., Nicolet M.A. J. Appl. Phys. 64:1988;2787.
9. Bosseboeuf A., Fourier A., Meyer F., Benhocine A., Gautherin G. Appl. Surf. Sci. 53:1991;353.
10. Boukhris L., Poitevin J.M. Thin Solid Films. 310:1997;222.
11. Shen Y.G., Mai Y.W., Zhang Q.C., McKenzie D.R., McFall W.D., McBride W.E. J. Appl. Phys. 87:2000;177.
12. Shen Y.G., Mai Y.W., McBride W.E., McKenzie D.R., Zhang Q.C. Appl. Phys. Lett. 75:1999;2211.
13. G.M. Turner, PhD Thesis, University of Sydney, 1991.
14. Thornton J.A., Hoffman D.W. Thin Solid Films. 171:1989;5.
15. Bauccio M. ASM Metals Reference Book. 1994;American Society for Metals, Metals Park, OH.
16. Shen Y.G., Yao J., O'Connor D.J., King B.V., MacDonald R.J. Phys. Rev. B. 56:1997;9894.
17. Dirks A.G., Wolters R.A.M., De Veirman A.E.M. Thin Soild Films. 208:1992;181.
18. Nakajima, T.K. Watanabe, N. Watanabe, J. Electrochem. Soc. 134 (1987) 3175.
19. Brundle C.R. J. Vac. Sci. Technol. 13:1976;301.
20. Egerton R.F. Electron Energy Loss Spectroscopy in the Electron Microscope, 2nd ed. 1996;Plenum, New York.