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Applied Surface Science

Volumn 183, Issue 3-4, 2001, Pages 246-258

Study of composition and bonding character of CN x films

(5) Soto, G a Samano, E C a Machorro, R a Farias M H a Cota Araiza, L a

a CENTRO DE CIENCIAS DE LA MATERIA CONDENSADA (Mexico)

Author keywords

Carbon nitride; Chemical state; Polyimides; Polymerization; Thermal treatment

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CHEMICAL BONDS; ELECTRON ENERGY LOSS SPECTROSCOPY; LASER ABLATION; POLYIMIDES; POLYMERIZATION; RAPID THERMAL ANNEALING; X RAY PHOTOELECTRON SPECTROSCOPY;

TEMPERATURE DESORPTION SPECTROSCOPY (TDS);

CARBON NITRIDE;

EID: 0035965655 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(01)00567-0 Document Type: Article

Times cited : (38)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.