Calculations of electron inelastic mean free paths (IMFPs): VI. Analysis of the gries inelastic scattering model and predictive IMFP equation

Surface and Interface Analysis

Volumn 25, Issue 1, 1997, Pages 25-35

  Tanuma, S ^a   Powell, C J ^b   Penn, D R ^b  

^a Arc Corporation   (Japan)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Calculated IMFP; Electron inelastic mean free path; Inelastic electron scattering

Indexed keywords

CALCULATIONS; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; ELECTRONIC DENSITY OF STATES; ELECTRONIC STRUCTURE; EQUATIONS OF MOTION; MATHEMATICAL MODELS; NUMERICAL ANALYSIS; SURFACE PHENOMENA;

ELECTRON INELASTIC MEAN FREE PATH; GRIES FITTING PARAMETER; GRIES MODEL; INELASTIC ELECTRON SCATTERING;

ELECTRON TRANSPORT PROPERTIES;

EID: 0030736452     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199701)25:1<25::AID-SIA207>3.0.CO;2-2     Document Type: Article

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