Characterization of hydrogenated amorphous carbon nitride particles and coatings obtained in a CH4/N2 radiofrequency discharge

Thin Solid Films

Volumn 482, Issue 1-2, 2005, Pages 226-231

  Pereira, Jérémy ^a   Géraud Grenier, Isabelle ^a   Massereau Guilbaud, Véronique ^a   Plain, André ^a  

^a UNIVERSITÉ D'ORLÉANS   (France)

Author keywords

Carbon nitride; Dusty plasma; Infrared spectroscopy; Scanning electron microscopy

Indexed keywords

ABSORPTION; CHEMICAL REACTORS; COATINGS; HYDROGENATION; INFRARED SPECTROSCOPY; METHANE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY;

DUSTY PLASMA; GAS MIXTURES; NITROGEN CONTENT; RADIO FREQUENCY DISCHARGE;

CARBON NITRIDE;

EID: 17644422182     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.11.150     Document Type: Conference Paper

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