SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 187, Issue 2-3, 2004, Pages 336-342

Characterization of particulates and coatings created in a 13.56 MHz radiofrequency methane plasma

(3) Géraud Grenier, Isabelle a Massereau Guilbaud, Véronique a Plain, André a

a UNIVERSITÉ D'ORLÉANS (France)

Author keywords

Dusty plasma; Infrared spectroscopy; Methane; Scanning electron microscopy

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; COATINGS; ELECTRODES; HYDROCARBONS; INFRARED RADIATION; METHANE; MICROSTRUCTURE; PLASMA APPLICATIONS; POWDERS; RADIOFREQUENCY SPECTROSCOPY; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

BROWN PARTICULATES; CARBON PARTICULATES;

PARTICLES (PARTICULATE MATTER);

SCANNING ELECTRON MICROSCOPY;

EID: 4544292434 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.01.043 Document Type: Article

Times cited : (21)

References (23)

1
- 0026816817
- Roberston J. Surf. Coat. Technol. 50 1992 185
- (1992) Surf. Coat. Technol. , vol.50 , pp. 185
- Roberston, J.¹

2
- 0028416278
- Matthews A. Eskildsen S.S. Diamond Relat. Mater. 3 1994 902
- (1994) Diamond Relat. Mater. , vol.3 , pp. 902
- Matthews, A.¹ Eskildsen, S.S.²

3
- 0035907515
- Tomasella E. Meunier C. Mikhailov S. Surf. Coat. Technol. 141 2001 286
- (2001) Surf. Coat. Technol. , vol.141 , pp. 286
- Tomasella, E.¹ Meunier, C.² Mikhailov, S.³

4
- 0035248407
- Theye M.L. Paret V. Sadki A. Diamond Relat. Mater. 10 2001 182
- (2001) Diamond Relat. Mater. , vol.10 , pp. 182
- Theye, M.L.¹ Paret, V.² Sadki, A.³

5
- 0000335922
- von Keudell A. Jacob W. J. Appl. Phys. 79 2 1996 1092
- (1996) J. Appl. Phys. , vol.79 , Issue.2 , pp. 1092
- von Keudell, A.¹ Jacob, W.²

6
- 0032594147
- Lifshitz Y. Diamond Relat. Mater. 8 1999 1659
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1659
- Lifshitz, Y.¹

7
- 33646175630
- Selwyn G.S. Sing J. Benett R.S. J. Vac. Sci. Technol. A7 1989 2758
- (1989) J. Vac. Sci. Technol. , vol.A7 , pp. 2758
- Selwyn, G.S.¹ Sing, J.² Benett, R.S.³

8
- 0034501560
- Cheng Y.H. Wu Y.P. Chen J.G. Qiao X.L. Xie C.S. Tay B.K. Lau S.P. Shi X. Surf. Coat. Technol. 135 2000 27
- (2000) Surf. Coat. Technol. , vol.135 , pp. 27
- Cheng, Y.H.¹ Wu, Y.P.² Chen, J.G.³ Qiao, X.L.⁴ Xie, C.S.⁵ Tay, B.K.⁶ Lau, S.P.⁷ Shi, X.⁸

9
- 0032476352
- Burden A.P. Anguita J.V. Silva S.R.P. Thin Solid Films 332 1998 252 256
- (1998) Thin Solid Films , vol.332 , pp. 252-256
- Burden, A.P.¹ Anguita, J.V.² Silva, S.R.P.³

10
- 0036670813
- Suda Y. Ono T. Akazawa M. Sakai Y. Tsujino J. Homma N. Thin Solid Films 451 2002 15
- (2002) Thin Solid Films , vol.451 , pp. 15
- Suda, Y.¹ Ono, T.² Akazawa, M.³ Sakai, Y.⁴ Tsujino, J.⁵ Homma, N.⁶

11
- 0035866530
- Reynaud C. Guillois O. Herlin-Boime N. Rouzaud J.N. Galvez A. Clinard C. Balanzat E. Ramillon J.M. Spectrochim. Acta, Part A: Mol. Biomol. Spectrosc. 57 2001 797
- (2001) Spectrochim. Acta Part A: Mol. Biomol. Spectrosc. , vol.57 , pp. 797
- Reynaud, C.¹ Guillois, O.² Herlin-Boime, N.³ Rouzaud, J.N.⁴ Galvez, A.⁵ Clinard, C.⁶ Balanzat, E.⁷ Ramillon, J.M.⁸

12
- 0037454456
- Berndt J. Hong S. Winter J. Vacuum 71 2003 377
- (2003) Vacuum , vol.71 , pp. 377
- Berndt, J.¹ Hong, S.² Winter, J.³

13
- 0034226703
- Massereau-Guilbaud V. Géraud-Grenier I. Plain A. Eur. Phys. J., Appl. Phys. 11 2000 71
- (2000) Eur. Phys. J. Appl. Phys. , vol.11 , pp. 71
- Massereau-Guilbaud, V.¹ Géraud-Grenier, I.² Plain, A.³

14
- 0035363361
- Géraud-Grenier I. Massereau-Guilbaud V. Plain A. Eur. Phys. J., Appl. Phys. 14 2001 187
- (2001) Eur. Phys. J. Appl. Phys. , vol.14 , pp. 187
- Géraud-Grenier, I.¹ Massereau-Guilbaud, V.² Plain, A.³

15
- 0033204640
- Géraud-Grenier I. Massereau-Guilbaud V. Plain A. Eur. Phys. J., Appl. Phys. 8 1999 53
- (1999) Eur. Phys. J., Appl. Phys. , vol.8 , pp. 53
- Géraud-Grenier, I.¹ Massereau-Guilbaud, V.² Plain, A.³

16
- 0033737883
- Mutsukura N. Akita K. Diamond Relat. Mater. 9 2000 761
- (2000) Diamond Relat. Mater. , vol.9 , pp. 761
- Mutsukura, N.¹ Akita, K.²

17
- 0036150219
- von Keudell A. Thin Solid Films 402 2002 1
- (2002) Thin Solid Films , vol.402 , pp. 1
- von Keudell, A.¹

18
- 0026139881
- Rhallabi A. Catherine Y. IEEE Trans. Plasma Sci. 19 1991 270
- (1991) IEEE Trans. Plasma Sci. , vol.19 , pp. 270
- Rhallabi, A.¹ Catherine, Y.²

19
- 0001620989
- Dischler B. E-MRS Proc. 17 1987 189
- (1987) E-MRS Proc. , vol.17 , pp. 189
- Dischler, B.¹

20
- 0000291119
- De Martino C. Demichelis F. Tagliaferro A. Diamond Relat. Mater. 4 1995 1210
- (1995) Diamond Relat. Mater. , vol.4 , pp. 1210
- De Martino, C.¹ Demichelis, F.² Tagliaferro, A.³

21
- 0032607047
- Stiegler J. Michler J. Blank E. Diamond Relat. Mater. 8 1999 651
- (1999) Diamond Relat. Mater. , vol.8 , pp. 651
- Stiegler, J.¹ Michler, J.² Blank, E.³

22
- 0032685276
- Deschenaux Ch. Affolter A. Magni D. Hollenstein Ch. Fayet P. J. Phys. D, Appl. Phys. 32 1999 1876-1886
- (1999) J. Phys. D Appl. Phys. , vol.32 , pp. 1876-1886
- Deschenaux, Ch.¹ Affolter, A.² Magni, D.³ Hollenstein, Ch.⁴ Fayet, P.⁵

23
- 85058248532
- Braca E. Kenny J.M. Korzec D. Engemann J. Thin Solid Films 394 2001 30
- (2001) Thin Solid Films , vol.394 , pp. 30
- Braca, E.¹ Kenny, J.M.² Korzec, D.³ Engemann, J.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.