Synthesis and optical characterization of amorphous carbon nitride thin films by hot filament assisted RF plasma CVD

Vacuum

Volumn 69, Issue 4, 2003, Pages 495-500

  Kundoo, S ^a   Chattopadhyay, K K ^a   Banerjee, A N ^a   Nandy, S K ^a  

^a JADAVPUR UNIVERSITY   (India)

Author keywords

Amorphous; Carbon nitride; Chemical vapour deposition; Optical properties

Indexed keywords

AMORPHOUS FILMS; ENERGY GAP; ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED RADIATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; SYNTHESIS (CHEMICAL); THIN FILMS;

OPTICAL CHARACTERIZATION;

CARBON INORGANIC COMPOUNDS;

EID: 0037462241     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00561-4     Document Type: Article

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