Bonding structure of carbon nitride films by infrared ellipsometry

Physical Review B - Condensed Matter and Materials Physics

Volumn 64, Issue 12, 2001, Pages

  Laskarakis, A ^a   Logothetidis, S ^a   Gioti, M ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NITRIDE; FULLERENE DERIVATIVE; UNCLASSIFIED DRUG;

ARTICLE; BINDING AFFINITY; CROSS LINKING; CRYSTALLOGRAPHY; DIELECTRIC CONSTANT; DRY DEPOSITION; ELLIPSOMETRY; FILM; LIGHT ABSORPTION; STRUCTURE ANALYSIS; THERMOSTABILITY; VIBRATION;

EID: 0035883559     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.64.125419     Document Type: Article

References (38)

1. A Y. Liu and M L. Cohen, Science245, 841 (1989).
2. A Y. Liu and M L. Cohen, Phys. Rev. B41, 10 727 (1990).
3. Y K. Yap, S. Kida, T. Aoyama, Y. Mori, and T. Sasaki, Diamond Relat. Mater.8, 614 (1999).
4. C. Ronning, H. Feldermann, R. Merk, H. Hofsass, P. Reinke, and J U. Thiele, Phys. Rev. B58, 2207 (1998).
5. L R. Shaginyan, A A. Onoprienko, V M. Vereschaka, F. Fendrych, and V G. Vysotsky, Surf. Coat. Technol.113, 134 (1999).
6. T. Szörényi, C. Fuchs, E. Hommet, and F. Le Normand, Surf. Coat. Technol.125, 308 (2000).
7. T. Sebald, R. Kaltofen, and G. Weise, Surf. Coat. Technol.98, 1280 (1998).
8. S. Muhl and J M. Mendez, Diamond Relat. Mater.8, 1809 (1999).
9. Y. Taki, T. Kitagawa, and O. Takai, Thin Solid Films304, 183 (1997).
10. K M. Yu, M L. Cohen, E E. Haller, W L. Hansen, and A Y. Liu, Phys. Rev. B49, 2034 (1994).
11. C. Niu, Y Z. Lu, and C M. Lieber, Science261, 334 (1993).
12. D. Marton, K J. Boyd, A H. Al-Bayati, S S. Todorov, and J W. Rabalais, Phys. Rev. Lett.73, 118 (1994).
13. N. Hellgren, M P. Johansson, E. Broitman, L. Hultman, and J.-E. Sundgren, Phys. Rev. B59, 5162 (1999).
14. H. Sjöström, S. Stafstrom, M. Boman, J.-E. Sundgren, Phys. Rev. Lett.75, 1336 (1995).
15. H. Sjöström, L. Hultman, J.-E. Sundgren, S V. Hainsworth, T F. Page, and G S A. M. Theunissen, J. Vac. Sci. Technol. B14, 56 (1996).
16. W T. Zheng, E. Broitman, N. Hellgren, K Z. Xing, I. Ivanov, H. Sjöström, L. Hultman, and J.-E. Sundgren, Thin Solid Films308, 223 (1997).
17. R. Kaltofen, T. Sebald, J. Schulte, and G. Weise, Thin Solid Films347, 31 (1999).
18. R M A. Azam and H M. Bashara, Ellipsometry and Polarized Light (North Holland, Amsterdam, 1977).
19. M. Gioti, S. Logothetidis, C. Charitidis, and H. Lefakis, Vacuum53, 53 (1999).
20. J. FingPhys. Rev. B30, 4713 (1984).
21. P. Kovarik, E B D. Bourdon, and R H. Prince, Phys. Rev. B48, 12 123 (1993).
22. S. Logothetidis, J. Petalas, N K. Flevaris, and R L. Johnson, Thin Solid Films234, 538 (1993).
23. S R P. Silva, J. Robertson, G A J. Amaratunga, B. Rafferty, L M. Brown, J. Schwan, D F. Franceschini, and G. Mariotto, J. Appl. Phys.81, 2626 (1997).
24. M R. Wixom, J. Am. Ceram. Soc.73, 1973 (1990).
25. D. Lin-Vien, N B. Colthup, W G. Fateley, and J G. Grasselli, The Handbook of Infrared and Raman Characteristic Frequencies of Organic Molecules (Boston Academic Press, 1991).
26. Y. Liu, C. Jiaa, and H. Do, Surf. Coat. Technol.115, 95 (1999).
27. J H. Kaufman, S. Metin, and D D. Saperstein, Phys. Rev. B39, 13 053 (1989).
28. G E. Jellison and F A. Modine, Appl. Phys. Lett.69, 371 (1996).
29. For identification of the (formula presented) and (formula presented) electronic transitions in crystalline graphite, see, for example, Phys. Rev. B 55, 4999 (1997), and for the (formula presented) transitions of diamond
30. 29, 3470 (1984)
31. and 46, 4483 (1992).
32. S. Logothetidis, H. Lefakis, and M. Gioti, Carbon36, 757 (1998).
33. M. Gioti and S. Logothetidis, Diamond Relat. Mater.8, 446 (1999).
34. M C. dos Santos and F. Alvarez, Phys. Rev. B58, 13 918 (1998).
35. S. Logothetidis, P. Patsalas, and C. Charitidis (unpublished).
36. R. Prioli, S I. Zanette, A O. Caride, M M. Lacerda, and F L. Freize Jr., Diamond Relat. Mater.8, 993 (1999).
37. G L. Chen, Y. Li, J. Lin, C H A. Huan, and Y P. Guo, Diamond Relat. Mater.8, 1906 (1999).
38. In accordance with crystalline graphite where the (formula presented) (formula presented) bonds contribute to the (formula presented) transitions and at an energy of ∼2 eV above of the (formula presented) carbon-carbon bonds (∼12 eV) in diamond, we assume a similar scheme to occur here.