An investigation of structural defects in diamond films grown at low substrate temperatures

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 651-656

  Stiegler, J ^a   Michler, J ^a   Blank, E ^a  

^a EPFL   (Switzerland)

Author keywords

Bonding defects; Diamond films; Impurities; Low temperature growth

Indexed keywords

CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; CRYSTAL DEFECTS; CRYSTAL IMPURITIES; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HIGH TEMPERATURE EFFECTS; HYDROGEN; LUMINESCENCE; NITROGEN; RAMAN SPECTROSCOPY;

BONDING DEFECTS;

DIAMOND FILMS;

EID: 0032607047     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00272-6     Document Type: Article

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