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Journal of Materials Research

Volumn 17, Issue 1, 2002, Pages 36-42

Study of stresses in thin silicon wafers with near-infrared phase stepping photoelasticity

(2) Zheng, Tieyu a Danyluk, Steven a

a GEORGIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; BIREFRINGENCE; INFRARED TRANSMISSION; PHOTOELASTICITY; STRESS ANALYSIS;

PHASE STEPPING;

SILICON WAFERS;

EID: 0036265210 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2002.0008 Document Type: Article

Times cited : (34)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.