Residual strain as a measure of wafer quality in indium phosphide crystals

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1997, Pages 209-212

  Yamada, M ^a   Ito, K ^a   Fukuzawa, M ^a  

^a KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL GROWTH; NONDESTRUCTIVE EXAMINATION; PLASTIC DEFORMATION; POLARISCOPES; RESIDUAL STRESSES; SEMICONDUCTOR DEVICE MANUFACTURE; THERMAL STRESS;

SCANNING INFRARED POLARISCOPES;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0030719015     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)