SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 657, Issue , 2001, Pages

Developing a new material for MEMS: Amorphous diamond

(10) Sullivan, J P a Friedmann, T A a De Boer, M P a LaVan, D A a Hohlfelder, R J a Ashby, C I H a Dugger, M T a Mitchell, M a Dunn, R G a Magerkurth, A J a

a SANDIA NATIONAL LABORATORIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CANTILEVER BEAMS; CRYSTALLINE MATERIALS; DEPOSITION; DIAMONDS; ELASTIC MODULI; FRACTURE TOUGHNESS; HEAT TREATMENT; MICROMACHINING; PLASTIC DEFORMATION; RELAXATION PROCESSES; RESIDUAL STRESSES; STICTION; SURFACE ROUGHNESS; TENSILE TESTING; WEAR OF MATERIALS;

AMORPHOUS DIAMONDS;

MICROELECTROMECHANICAL DEVICES;

EID: 17144440620 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (24)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.