Microstereolithography of lead zirconate titanate thick film on silicon substrate

Sensors and Actuators, A: Physical

Volumn 87, Issue 1-2, 2000, Pages 72-77

  Jiang, X N ^a   Sun, C ^a   Zhang, X ^a   Xu, B ^a   Ye, Y H ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; DIELECTRIC LOSSES; LASER APPLICATIONS; LITHOGRAPHY; MICROACTUATORS; MICROSENSORS; PERMITTIVITY; PIEZOELECTRICITY; POLARIZATION; POLYMERIZATION; SEMICONDUCTING SILICON; THICKNESS MEASUREMENT;

FIELD INDUCED PIEZOELECTRIC COEFFICIENT; LEAD ZIRCONATE TITANATE; MICROSTEREOLITHOGRAPHY; PIEZOELECTRIC VOLTAGE COEFFICIENT; REMNANT POLARIZATION;

LEAD COMPOUNDS;

EID: 0034508234     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00467-2     Document Type: Article

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