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Volumn 33, Issue 14, 1997, Pages 1260-1261
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Fabrication of submicrometre 3D periodic structures composed of Si/SiO2
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Author keywords
Silicon dioxide; Sputter etching
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Indexed keywords
ETCHING;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MANUFACTURE;
SILICA;
SPUTTER ETCHING;
SUBMICROMETER PERIODIC STRUCTURES;
SEMICONDUCTOR DEVICE STRUCTURES;
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EID: 0031551272
PISSN: 00135194
EISSN: None
Source Type: Journal
DOI: 10.1049/el:19970844 Document Type: Article |
Times cited : (140)
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References (5)
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