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Volumn 33, Issue 14, 1997, Pages 1260-1261

Fabrication of submicrometre 3D periodic structures composed of Si/SiO2

Author keywords

Silicon dioxide; Sputter etching

Indexed keywords

ETCHING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SILICA;

EID: 0031551272     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19970844     Document Type: Article
Times cited : (140)

References (5)
  • 1
    • 0027549799 scopus 로고
    • Photonic band-gap structures
    • YABLONOVITCH, E.: 'Photonic band-gap structures', J. Opt. Soc. Am. B, 1993, 10, (2), pp. 283-295
    • (1993) J. Opt. Soc. Am. B , vol.10 , Issue.2 , pp. 283-295
    • Yablonovitch, E.1
  • 2
    • 0030258283 scopus 로고    scopus 로고
    • All-silica single-mode optical fiber with photonic crystal cladding
    • KNIGHT, J.C., BIRKS, T.A., RUSSELL, P.ST.J., and ATKIN, D.M.: 'All-silica single-mode optical fiber with photonic crystal cladding', Opt. Lett., 1996, 21, (19), pp. 1547-1549
    • (1996) Opt. Lett. , vol.21 , Issue.19 , pp. 1547-1549
    • Knight, J.C.1    Birks, T.A.2    Russell, P.St.J.3    Atkin, D.M.4
  • 3
    • 0030189725 scopus 로고    scopus 로고
    • New realization method for three-dimensional photonic crystal in optical wavelength region
    • NODA, S., YAMAMOTO, N., and SASAKI, A.: 'New realization method for three-dimensional photonic crystal in optical wavelength region', Jpn. J. Appl. Phys., 1996, 35, (7B), pp. L909-L912
    • (1996) Jpn. J. Appl. Phys. , vol.35 , Issue.7 B
    • Noda, S.1    Yamamoto, N.2    Sasaki, A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.