Three-dimensional microstructures created by laser microfabrication technology

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 38, Issue 2 B, 1999, Pages

  Horiyama, Makoto ^a   Sun, Hong Bo ^a   Miwa, Masafumi ^a   Matsuo, Shigeki ^a   Misawa, Hiroaki ^a  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; MICROMACHINING; OPTICAL MICROSCOPY; PHOTOPOLYMERIZATION; PULSED LASER APPLICATIONS;

LASER MICROFABRICATION; STEREOLITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 0032632213     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.38.L212     Document Type: Article

References (15)