STM/AFM nano-oxidation process to room-temperature-operated single-electron transistor and other devices

Proceedings of the IEEE

Volumn 85, Issue 4, 1997, Pages 612-628

  Matsumoto, Kazuhiko ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

AFM; HEMT; Optical switch; Oxidation

Indexed keywords

ATOMIC FORCE MICROSCOPY; HIGH ELECTRON MOBILITY TRANSISTORS; OPTICAL SWITCHES; OXIDATION; PHOTOCONDUCTING DEVICES; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTOR QUANTUM WELLS;

SINGLE ELECTRON TRANSISTOR (SET);

NANOTECHNOLOGY;

EID: 0031123837     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.573745     Document Type: Article

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