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Volumn 649, Issue , 2001, Pages
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Finite element modeling of nanoindentation measurements of crystalline and amorphous Si
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS SILICON;
ATOMIC FORCE MICROSCOPY;
CRYSTALLINE MATERIALS;
DUCTILITY;
ELASTIC MODULI;
ELASTOPLASTICITY;
ELECTRON MICROSCOPY;
FINITE ELEMENT METHOD;
HARDNESS;
ION IMPLANTATION;
MATHEMATICAL MODELS;
PHASE TRANSITIONS;
ELASTIC PLASTIC SOLIDS;
MISES YIELD CRITERION;
NANOINDENTATION MEASUREMENTS;
INDENTATION;
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EID: 0034862193
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (9)
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References (11)
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