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Volumn 649, Issue , 2001, Pages

Finite element modeling of nanoindentation measurements of crystalline and amorphous Si

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; CRYSTALLINE MATERIALS; DUCTILITY; ELASTIC MODULI; ELASTOPLASTICITY; ELECTRON MICROSCOPY; FINITE ELEMENT METHOD; HARDNESS; ION IMPLANTATION; MATHEMATICAL MODELS; PHASE TRANSITIONS;

EID: 0034862193     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (9)

References (11)
  • 9
    • 0004058129 scopus 로고    scopus 로고
    • All of the indentation tests were performed at the MTS Systems Corp., Knoxville, TN


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.