Hinged-pad test structure for sliding friction measurement in micromachining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3512, Issue , 1998, Pages 241-250

  de Boer, Maarten P ^a   Redmond, Jim M ^a   Michalske, Terry A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FRICTION; INTERFEROMETRY; MICROMACHINING; PRESSURE DISTRIBUTION;

SLIDING FRICTIONS; TEST STRUCTURE DESIGNS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032290183     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (25)