SCOPUS 정보 검색 플랫폼

Modern Physics Letters B

Volumn 18, Issue 18, 2004, Pages 987-1001

The optical properties of nitrogenated amorphous carbon films grown by a novel surface wave microwave plasma CVD method

(8) Rusop, M a Adhikari, S b Omer, A M M b Adhikary, S b Uchida, H b Jimbo, T a Soga, T a Umeno, M b

a NAGOYA INSTITUTE OF TECHNOLOGY (Japan)

b CHUBU UNIVERSITY (Japan)

Author keywords

a C:N; Annealing; Camphor; Microwave plasma; Optical gap; Surface wave plasma

Indexed keywords

CARBON; NITROGEN; SILICON DIOXIDE;

ARTICLE; CHEMICAL BOND; CHEMICAL COMPOSITION; CHEMICAL STRUCTURE; COMPARATIVE STUDY; FILM; INFRARED SPECTROSCOPY; MICROWAVE RADIATION; RAMAN SPECTROMETRY; STRUCTURE ANALYSIS; TECHNIQUE; TEMPERATURE SENSITIVITY; THICKNESS;

EID: 12544259689 PISSN: 02179849 EISSN: None Source Type: Journal
DOI: 10.1142/S0217984904007529 Document Type: Article

Times cited : (10)

References (62)

1
- 0035502218
- Z. Q. Ma and B. X. Liu, Sol. Energy Mat. Sol. Cells 69 (2001) 339.
- (2001) Sol. Energy Mat. Sol. Cells , vol.69 , pp. 339
- Ma, Z.Q.¹ Liu, B.X.²

2
- 0036027541
- Z. B. Zhou, R. Q. Cui, Q. J. Pang, G. M. Hadi, Z. M. Ding and W. Y. Li, Sol. Energy Mater. Sol. Cells 70 (2002) 487.
- (2002) Sol. Energy Mater. Sol. Cells , vol.70 , pp. 487
- Zhou, Z.B.¹ Cui, R.Q.² Pang, Q.J.³ Hadi, G.M.⁴ Ding, Z.M.⁵ Li, W.Y.⁶

3
- 0031248068
- K. Yamamoto, Y. Koga, S. Fujiwara and F. Kokai, Jpn. J. Appl. Phys. 36 (1997) L1333.
- (1997) Jpn. J. Appl. Phys. , vol.36
- Yamamoto, K.¹ Koga, Y.² Fujiwara, S.³ Kokai, F.⁴

4
- 0028449481
- H. J. Scheibe and B. Schultrich, Thin Solid Films 246 (1994) 92.
- (1994) Thin Solid Films , vol.246 , pp. 92
- Scheibe, H.J.¹ Schultrich, B.²

5
- 0028447923
- D. T. Peeler and P. T. Murray, Diamond Relat. Mater. 3 (1994) 1124.
- (1994) Diamond Relat. Mater. , vol.3 , pp. 1124
- Peeler, D.T.¹ Murray, P.T.²

6
- 0000492683
- F. Y. Chuang and C. Y. Sun, Appl. Phys. Lett. 69 (1996) 3504.
- (1996) Appl. Phys. Lett. , vol.69 , pp. 3504
- Chuang, F.Y.¹ Sun, C.Y.²

7
- 0029544827
- J. U. Oh, K.-R. Lee and K. Y. Eun, Thin Solid Films 270 (1995) 173.
- (1995) Thin Solid Films , vol.270 , pp. 173
- Oh, J.U.¹ Lee, K.-R.² Eun, K.Y.³

8
- 0029485317
- V. Palshin, E. I. Meletis, S. Ves and S. Logothetidis, Thin Solid Films 270 (1995) 165.
- (1995) Thin Solid Films , vol.270 , pp. 165
- Palshin, V.¹ Meletis, E.I.² Ves, S.³ Logothetidis, S.⁴

9
- 0027909231
- M. Vogel, O. Stenzel, R. Petrich, G. Schaarschmidt and W. Scharff, Thin Solid Films 227 (1993) 74.
- (1993) Thin Solid Films , vol.227 , pp. 74
- Vogel, M.¹ Stenzel, O.² Petrich, R.³ Schaarschmidt, G.⁴ Scharff, W.⁵

10
- 84896388503
- N. Savvides and B. Window, J. Vac. Sci. Technol. A3 (1985) 2386.
- (1985) J. Vac. Sci. Technol. , vol.A3 , pp. 2386
- Savvides, N.¹ Window, B.²

11
- 0029761835
- H. A. Yu, Y. Kaneko, S. Yoshimura and S. Otani, Appl. Phys. Lett. 68 (1996) 547.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 547
- Yu, H.A.¹ Kaneko, Y.² Yoshimura, S.³ Otani, S.⁴

12
- 0030288415
- M. Uchida, H. Tanaka and K. Kotera, Jpn. J. Appl. Phys. 35 (1996) 5815.
- (1996) Jpn. J. Appl. Phys. , vol.35 , pp. 5815
- Uchida, M.¹ Tanaka, H.² Kotera, K.³

13
- 36749117475
- B. Dischler, A. Bubenzer and P. Koidl, Appl. Phys. Lett. 42 (1983) 636.
- (1983) Appl. Phys. Lett. , vol.42 , pp. 636
- Dischler, B.¹ Bubenzer, A.² Koidl, P.³

14
- 0029533791
- Rusli, G. A. J. Amaratunga and S. R. P. Silva, Thin Solid Films 270 (1995) 160.
- (1995) Thin Solid Films , vol.270 , pp. 160
- Rusli¹ Amaratunga, G.A.J.² Silva, S.R.P.³

15
- 0027906837
- J. Robertson, J. Non-Cryst. Solids 164 (1993) 1115.
- (1993) J. Non-Cryst. Solids , vol.164 , pp. 1115
- Robertson, J.¹

16
- 0001759995
- M. Matsuoka and K. Ono, Appl. Phys. Lett. 50 (1987) 1864.
- (1987) Appl. Phys. Lett. , vol.50 , pp. 1864
- Matsuoka, M.¹ Ono, K.²

17
- 18244422344
- S. Matsuo and M. Kiuchi, Jpn. J. Appl. Phys. 22 (1983) L210.
- (1983) Jpn. J. Appl. Phys. , vol.22
- Matsuo, S.¹ Kiuchi, M.²

18
- 0025535548
- Y. H. Shing and F. S. Pool, Vacuum 41 (1990) 1368.
- (1990) Vacuum , vol.41 , pp. 1368
- Shing, Y.H.¹ Pool, F.S.²

19
- 0020829528
- B. Dischler, A. Bubenzer and P. Koidl, Solid State Commun. 48 (1983) 105.
- (1983) Solid State Commun. , vol.48 , pp. 105
- Dischler, B.¹ Bubenzer, A.² Koidl, P.³

20
- 0030676926
- J. Besold, R. Thielsch, N. Matz, C. Frenzel, R. Born and A Mobius, Thin Solid Films 293 (1997) 96.
- (1997) Thin Solid Films , vol.293 , pp. 96
- Besold, J.¹ Thielsch, R.² Matz, N.³ Frenzel, C.⁴ Born, R.⁵ Mobius, A.⁶

21
- 0031276733
- K. M. Krishna, T. Soga, K. Mukhopadhyay, M. Sharon and M. Umeno, Sol. Energy Mater. Sol. Cells 48 (1997) 25.
- (1997) Sol. Energy Mater. Sol. Cells , vol.48 , pp. 25
- Krishna, K.M.¹ Soga, T.² Mukhopadhyay, K.³ Sharon, M.⁴ Umeno, M.⁵

22
- 17144445403
- M. Rusop, S. M. Mominuzzaman, X. M. Tian, T. Soga, T. Jimbo and M. Umeno, Appl. Surf. Sci. 197 (2002) 542.
- (2002) Appl. Surf. Sci. , vol.197 , pp. 542
- Rusop, M.¹ Mominuzzaman, S.M.² Tian, X.M.³ Soga, T.⁴ Jimbo, T.⁵ Umeno, M.⁶

23
- 0037139072
- M. Rusop, S. M. Mominuzzaman, T. Soga, T. Jimbo and M. Umeno, Int. J. Mod. Phys. B6 (2002) 866.
- (2002) Int. J. Mod. Phys. , vol.B6 , pp. 866
- Rusop, M.¹ Mominuzzaman, S.M.² Soga, T.³ Jimbo, T.⁴ Umeno, M.⁵

24
- 11144228015
- M. Rusop, X. M. Tian, T. Soga, T. Jimbo and M. Umeno, Mol. Cryst. Liq. Cryst. 388 (2002) 509.
- (2002) Mol. Cryst. Liq. Cryst. , vol.388 , pp. 509
- Rusop, M.¹ Tian, X.M.² Soga, T.³ Jimbo, T.⁴ Umeno, M.⁵

25
- 0000209343
- S. M. Mominuzzaman, K. M. Krishna, T. Soga, T. Jimbo and M. Umeno, Jpn. J. Appl. Phys. 38 (1999) 658.
- (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 658
- Mominuzzaman, S.M.¹ Krishna, K.M.² Soga, T.³ Jimbo, T.⁴ Umeno, M.⁵

26
- 0036508139
- M. Nagatsu, T. Sano, N. Takada, N. Toyoda, M. Tanga and H. Sugai, Diamond Relat. Mater. 11 (2002) 976.
- (2002) Diamond Relat. Mater. , vol.11 , pp. 976
- Nagatsu, M.¹ Sano, T.² Takada, N.³ Toyoda, N.⁴ Tanga, M.⁵ Sugai, H.⁶

27
- 0031209286
- M. Nagatsu, G. Xu, I. Ghanashev, M. Khanoh and H. Sugai, Plasma Sources Sci. Technol. 6 (1997) 427.
- (1997) Plasma Sources Sci. Technol. , vol.6 , pp. 427
- Nagatsu, M.¹ Xu, G.² Ghanashev, I.³ Khanoh, M.⁴ Sugai, H.⁵

28
- 3342879275
- K. Mukhopadhyay, K. M. Krishna and M. Sharon, Phys. Rev. Lett. 72 (1994) 3182.
- (1994) Phys. Rev. Lett. , vol.72 , pp. 3182
- Mukhopadhyay, K.¹ Krishna, K.M.² Sharon, M.³

29
- 0029236607
- M. Sharon, K. Mukhopadhyay, I. Mukhopadhyay and K. M. Krishna, Carbon 33 (1995) 331.
- (1995) Carbon , vol.33 , pp. 331
- Sharon, M.¹ Mukhopadhyay, K.² Mukhopadhyay, I.³ Krishna, K.M.⁴

30
- 0004132773
- Plenum Press
- J. Tauc, Amorphous and Liquid Semiconductors (Plenum Press, 1974).
- (1974) Amorphous and Liquid Semiconductors
- Tauc, J.¹

31
- 0009597521
- X. Shi, L. K. Cheah and B. K. Tay, Thin Solid Films 312 (1998) 166.
- (1998) Thin Solid Films , vol.312 , pp. 166
- Shi, X.¹ Cheah, L.K.² Tay, B.K.³

32
- 0032300873
- L. K. Cheah, X. Shi, J. R. Shi, E. J. Liu and S. R. P. Silva, J. Non-Crystal. Solids 242 (1998) 40.
- (1998) J. Non-Crystal. Solids , vol.242 , pp. 40
- Cheah, L.K.¹ Shi, X.² Shi, J.R.³ Liu, E.J.⁴ Silva, S.R.P.⁵

33
- 0021558454
- Part B, ed. J. I. Pankove Academic Press, Orlando
- G. D. Cody, in Semiconductors and Semimetals, Vol. 21, Part B, ed. J. I. Pankove (Academic Press, Orlando, 1984), p. 11.
- (1984) Semiconductors and Semimetals , vol.21 , pp. 11
- Cody, G.D.¹

34
- 12944267050
- J. V. Anguita and S. R. P. Silva, Diamond Relat. Mater. 9 (2000) 777.
- (2000) Diamond Relat. Mater. , vol.9 , pp. 777
- Anguita, J.V.¹ Silva, S.R.P.²

35
- 0032685904
- D. Chen, A. Wei, S. P. Wong and S. Peng, Diamond Relat. Mater. 8 (1999) 1130.
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1130
- Chen, D.¹ Wei, A.² Wong, S.P.³ Peng, S.⁴

36
- 0032066994
- S. Nitta, N. Takada, K. Sugiyama, T. Itoh and S. Nonomura, J. Non-Cryst. Solids 230 (1998) 655.
- (1998) J. Non-Cryst. Solids , vol.230 , pp. 655
- Nitta, S.¹ Takada, N.² Sugiyama, K.³ Itoh, T.⁴ Nonomura, S.⁵

37
- 4243240242
- M. Yoshikawa, N. Nagai, M. Matsuki, H. Fukuda, G. Katagiri, H. Ishida and A. Ishitani, Phys. Rev. B46 (1992) 7169.
- (1992) Phys. Rev. , vol.B46 , pp. 7169
- Yoshikawa, M.¹ Nagai, N.² Matsuki, M.³ Fukuda, H.⁴ Katagiri, G.⁵ Ishida, H.⁶ Ishitani, A.⁷

38
- 0000209343
- S. M. Mominuzzaman, K. M. Krishna, T. Soga, T. Jimbo and M. Umeno, Jpn. J. Appl. Phys. 38 (1999) 658.
- (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 658
- Mominuzzaman, S.M.¹ Krishna, K.M.² Soga, T.³ Jimbo, T.⁴ Umeno, M.⁵

39
- 0028513408
- M. A. Tamor and W. C. Vasell, J. Appl. Phys. 76 (1994) 3823.
- (1994) J. Appl. Phys. , vol.76 , pp. 3823
- Tamor, M.A.¹ Vasell, W.C.²

40
- 36749117475
- B. Dischler, A. Bubenzer and P. Koidl, Appl. Phys. Lett. 42 (1983) 636.
- (1983) Appl. Phys. Lett. , vol.42 , pp. 636
- Dischler, B.¹ Bubenzer, A.² Koidl, P.³

41
- 0024620920
- D. S. Knight and W. B. White, J. Mater. Res. 4 (1989) 385.
- (1989) J. Mater. Res. , vol.4 , pp. 385
- Knight, D.S.¹ White, W.B.²

42
- 0000425471
- S. R. P. Silva, J. Robertson, G. A. J. Amaratunga, B. Rafferty, L. M. Brown, J. Schwan, D. F. Franceschini and G. Mariotto, J. Appl. Phys. 81 (1997) 2626.
- (1997) J. Appl. Phys. , vol.81 , pp. 2626
- Silva, S.R.P.¹ Robertson, J.² Amaratunga, G.A.J.³ Rafferty, B.⁴ Brown, L.M.⁵ Schwan, J.⁶ Franceschini, D.F.⁷ Mariotto, G.⁸

43
- 0028513408
- M. A. Tamor and W. C. Vassell, J. Appl. Phys. 76 (1994) 3823.
- (1994) J. Appl. Phys. , vol.76 , pp. 3823
- Tamor, M.A.¹ Vassell, W.C.²

44
- 0000693937
- J. E. Smith Jr., M. H. Brodsky, B. L. Crowder, M. I. Nathan and A. Pinczuk, Phys. Rev. Lett. 26 (1971) 642.
- (1971) Phys. Rev. Lett. , vol.26 , pp. 642
- Smith Jr., J.E.¹ Brodsky, M.H.² Crowder, B.L.³ Nathan, M.I.⁴ Pinczuk, A.⁵

45
- 0242603790
- A. C. Ferrari and J. Robertson, Phys. Rev. B61 (2000) 14095.
- (2000) Phys. Rev. , vol.B61 , pp. 14095
- Ferrari, A.C.¹ Robertson, J.²

46
- 0027678504
- N. Nakayama, Y. Tsuchiya, S. Tamada, K. Kosuge, S. Nagata, K. Takahiro and S. Yamaguchi, Jpn. J. Appl. Phys. 32 (1993) 1465.
- (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 1465
- Nakayama, N.¹ Tsuchiya, Y.² Tamada, S.³ Kosuge, K.⁴ Nagata, S.⁵ Takahiro, K.⁶ Yamaguchi, S.⁷

47
- 36449009256
- A. Bousetta, M. Lu, A. Bensaola and A. Schults, Appl. Phys. Lett. 65 (1994) 696.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 696
- Bousetta, A.¹ Lu, M.² Bensaola, A.³ Schults, A.⁴

48
- 36448999356
- Z. J. Zhang, S. Fan and C. M. Lieber, Appl. Phys. Lett. 66 (1995) 3582.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 3582
- Zhang, Z.J.¹ Fan, S.² Lieber, C.M.³

49
- 0031245673
- W. T. Zeng, E. Broitman, N. Hellgren, K. Z. Xing, I. Ivanov, H. Sjostrom, L. Hultman and J. E. Sundgren, Thin Solid Films 308 (1997) 223.
- (1997) Thin Solid Films , vol.308 , pp. 223
- Zeng, W.T.¹ Broitman, E.² Hellgren, N.³ Xing, K.Z.⁴ Ivanov, I.⁵ Sjostrom, H.⁶ Hultman, L.⁷ Sundgren, J.E.⁸

50
- 0031543052
- P. Hammer, M. A. Baker, C. Lenardi and W. Gissler, J. Vac. Sci. Technol. A15 (1997) 107.
- (1997) J. Vac. Sci. Technol. , vol.A15 , pp. 107
- Hammer, P.¹ Baker, M.A.² Lenardi, C.³ Gissler, W.⁴

51
- 0025464039
- M. Wixom, J. Am. Ceram. Soc. 73 (1990) 1973.
- (1990) J. Am. Ceram. Soc. , vol.73 , pp. 1973
- Wixom, M.¹

52
- 0031186143
- Y. Taki, T. Kitagawa and O. Takai, Thin Solid Films 304 (1997) 183.
- (1997) Thin Solid Films , vol.304 , pp. 183
- Taki, Y.¹ Kitagawa, T.² Takai, O.³

53
- 0001548543
- J. F. Kaufman, S. Metin and D. D. Saperstein, Phys. Rev. B39 (1989) 13053.
- (1989) Phys. Rev. , vol.B39 , pp. 13053
- Kaufman, J.F.¹ Metin, S.² Saperstein, D.D.³

54
- 0032606771
- Y. Aoi, K. Ono and E. Kamijo, J. Appl. Phys. 86 (1999) 2318.
- (1999) J. Appl. Phys. , vol.86 , pp. 2318
- Aoi, Y.¹ Ono, K.² Kamijo, E.³

55
- 0001845235
- M. Friedrich, T. Welzel, R. Rochotzki, H. Kupfer and D. R. T. Zohn, Diamond Relat. Mater. 6 (1997) 33.
- (1997) Diamond Relat. Mater. , vol.6 , pp. 33
- Friedrich, M.¹ Welzel, T.² Rochotzki, R.³ Kupfer, H.⁴ Zohn, D.R.T.⁵

56
- 51149218763
- X. A. Zhao, C. W. Ong, Y. C. Tsang, Y. W. Wong, P. W. Chan and C. L. Choy, Appl. Phys. Lett. 66 (1995) 2652.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 2652
- Zhao, X.A.¹ Ong, C.W.² Tsang, Y.C.³ Wong, Y.W.⁴ Chan, P.W.⁵ Choy, C.L.⁶

57
- 0000017064
- Y. Tanabe, G. Burkhard, T. Ishikura, K. Tsunoda, H. Hasuo, M. Tamura, H. Tamura, A. Sawaoka and K. Uematsu, Jpn. J. Appl. Phys. 33 (1994) 6684.
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 6684
- Tanabe, Y.¹ Burkhard, G.² Ishikura, T.³ Tsunoda, K.⁴ Hasuo, H.⁵ Tamura, M.⁶ Tamura, H.⁷ Sawaoka, A.⁸ Uematsu, K.⁹

58
- 30244445276
- H. C. Barshila, S. Sah, B. R. Mehta, V. D. Vankar, D. K. Avasthi and G. K. Mehta, Thin Solid Films 258 (1995) 123.
- (1995) Thin Solid Films , vol.258 , pp. 123
- Barshila, H.C.¹ Sah, S.² Mehta, B.R.³ Vankar, V.D.⁴ Avasthi, D.K.⁵ Mehta, G.K.⁶

59
- 0031543052
- P. Hammer, M. A. Baker, C. Lenardi and W. Gissler, J. Vac. Sci. Technol. A15 (1997) 107.
- (1997) J. Vac. Sci. Technol. , vol.A15 , pp. 107
- Hammer, P.¹ Baker, M.A.² Lenardi, C.³ Gissler, W.⁴

60
- 0025464039
- M. R. Wixom, J. Am. Ceram. Soc. 73 (1990) 1973.
- (1990) J. Am. Ceram. Soc. , vol.73 , pp. 1973
- Wixom, M.R.¹

61
- 0032687103
- S. L. Sung, C. H. Tseng, F. K. Chiang, X. J. Guo and X. W. Liu, Thin Solid Films 340 (1999) 169.
- (1999) Thin Solid Films , vol.340 , pp. 169
- Sung, S.L.¹ Tseng, C.H.² Chiang, F.K.³ Guo, X.J.⁴ Liu, X.W.⁵

62
- 3342894858
- V. Paillard, P. Melinon, V. Dupuis, J. P. Perez, A. Perez and B. Champagnon, Phys. Rev. Lett. 71 (1993) 4170.
- (1993) Phys. Rev. Lett. , vol.71 , pp. 4170
- Paillard, V.¹ Melinon, P.² Dupuis, V.³ Perez, J.P.⁴ Perez, A.⁵ Champagnon, B.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.