Nitrogen doping and structural properties of amorphous carbon films deposited by pulsed laser ablation

Applied Surface Science

Volumn 197-198, Issue , 2002, Pages 542-546

  Rusop, M ^a   Mominuzzaman, S M ^b   Tian, X M ^a   Soga, T ^a   Jimbo, T ^a   Umeno, M ^c  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^b BANGLADESH UNIVERSITY OF ENGINEERING AND TECHNOLOGY   (Bangladesh)

^c CHUBU UNIVERSITY   (Japan)

Author keywords

Amorphous carbon; Carbon nitride; Doping; Laser ablation; Nitrogen; PLA

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAPHITIZATION; NITROGEN; PARTIAL PRESSURE; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING; X RAY PHOTOELECTRON SPECTROSCOPY;

NITROGEN DOPING;

AMORPHOUS FILMS;

EID: 17144445403     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00332-X     Document Type: Conference Paper

References (7)

1. Veerasamy V.S., Amaratunga G.A.J., Davis C.A., Timbs A.E., Milne W.I., Mackenzie D.R. J. Phys. 5 1993 L169.
2. Veerasamy V.S., Yuan J., Amaratunga G.A.J., Milne W.I., Gilkes K.W.R., Weiler M., Brown L.M. Phys. Rev. B 48 1993 17954.
3. Hammer P., Baker M.A., Lenardi C., Gissler W. J. Vac. Sci. Technol. A 15 1997 107.
4. Wixom M.R. J. Am. Ceram. Soc. 73 1990 1973.
5. Barklie R.C., Collins M., Cunniffe J., Silva S.R. Diamond Relat. Mater 6 1998 864.
6. Robertson J. Adv. Phys. 35 1986 317.
7. Fourches N., Turban G. Thin Solid Films 240 1994 28.