Temperature dependence of conductivity of nitrogen-containing diamondlike carbon films deposited from pyridine

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 11, 1996, Pages 5815-5819

  Uchida, Masao ^a   Tanaka, Hiroyoshi ^a   Kotera, Koichi ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

Benzene; Conductivity; Diamondlike carbon; DLC; Pyridine; Temperature dependence

Indexed keywords

ATMOSPHERIC TEMPERATURE EFFECT; DIAMOND LIKE FILMS; ELECTRON DELOCALIZATION; HOPPING SITES; PYRIDINE; THERMAL FILAMENT PLASMA CHEMICAL VAPOR DEPOSITION;

ATMOSPHERIC TEMPERATURE; BENZENE; CARBON; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRIC CONDUCTIVITY MEASUREMENT; NITROGEN; REACTION KINETICS; SEMICONDUCTING GLASS; SPUTTER DEPOSITION; SUBSTRATES; THERMAL EFFECTS;

CONDUCTIVE FILMS;

EID: 0030288415     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.5815     Document Type: Article

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