Formation and characteristics of undoped and doped tetrahedral amorphous carbon films

Diamond and Related Materials

Volumn 8, Issue 6, 1999, Pages 1130-1134

  Chen, D ^a,b   Wei, A ^a   Wong, S P ^b   Peng, S ^a  

^a SUN YAT SEN UNIVERSITY   (China)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Doping; Infra red spectroscopy; Optical absorption; Tetrahedral amorphous carbon

Indexed keywords

ACTIVATION ENERGY; CARBON; DEPOSITION; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY OF SOLIDS; FILM PREPARATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT ABSORPTION; NITROGEN; OPTICAL PROPERTIES; SYNTHESIS (CHEMICAL);

TETRAHEDRAL AMORPHOUS CARBON FILMS;

AMORPHOUS FILMS;

EID: 0032685904     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00101-6     Document Type: Article

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