Mode identification of surface waves excited in a planar microwave discharge

Plasma Sources Science and Technology

Volumn 6, Issue 3, 1997, Pages 427-434

  Nagatsu, M ^a   Xu, G ^a   Ghanashev, I ^a   Kanoh, M ^b   Sugai, H ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTROMAGNETIC DISPERSION; ELECTROMAGNETIC WAVE PROPAGATION IN PLASMA; LIGHT EMISSION; MATHEMATICAL MODELS; MICROWAVES; MOBILE ANTENNAS; PLASMA DENSITY; SLOT ANTENNAS; SURFACE WAVES; WAVE PLASMA INTERACTIONS;

MICROWAVE PLASMAS;

PLASMA SOURCES;

EID: 0031209286     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/6/3/020     Document Type: Article

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