Advances in reflection grating technology for Constellation-X

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5168, Issue , 2004, Pages 271-282

  Heilmann, Ralf K ^a   Akilian, Mireille ^a   Chang, Chih Hao ^a   Chen, Carl G ^a   Forest, Craig R ^a   Joo, Chulmin ^a   Konkola, Paul T ^a   Montoya, Juan C ^a   Sun, Yanxia ^a   You, Jenny ^a   Schattenburg, Mark L ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Blaze; Constellation X; In plane grating; Microcomb; Nanoimprint lithography; Reflection gratings; Replication; Saw tooth; Soff plane gratings; X ray optics

Indexed keywords

ASTROPHYSICS; DIFFRACTION GRATINGS; LIGHT INTERFERENCE; LIGHT REFLECTION; MICROMACHINING; PHOTOLITHOGRAPHY; X RAY OPTICS;

BLAZE; CONSTELLATION-X; IN PLANE GRATINGS; MICROCOMB; NANOIMPRINT LITHOGRAPHY; OFF PLANE GRATINGS; REFLECTION GRATINGS; SAWTOOTH;

ASTRONOMY;

EID: 11144355360     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.510258     Document Type: Conference Paper

References (39)

1. M. C. Weisskopf, B. Brinkman, C. Canizares, G. Garmire, S. Murray, and L. P. Van Speybroeck, "An overview of the performance and scientific results from the Chandra x-ray observatory," PASP 114, pp. 1-24, 2002.
2. http://constellation.gsfc.nasa.gov/
3. C. R. Forest, X-ray Telescope Foil Optics: Assembly, Metrology, and Constraint, Master's thesis, Dept. of Mechanical Engineering, MIT, 2003.
4. C. R. Forest, M. L. Schattenburg, C. G. Chen, R. K. Heilmann, P. T. Konkola, J. Przbylowski, Y. Sun, J. You, S. M. Kahn, and D. Golini, "Precision shaping, assembly, and metrology of foil optics for x-ray reflection gratings," in X-ray and Gamma-ray Telescopes and Instruments for Astronomy, J. E. Trümper and H. D. Tananbaum, eds., Proc. SPIE 4851, pp. 538-548, 2003.
5. C. G. Chen, L. M. Cohen, R. K. Heilmann, P. T. Konkola, O. Mongrard, G. P. Monnelly, and M. L. Schattenburg, "Micro-comb design and fabrication for high accuracy optical assembly," J. Vac. Sci. Technol. B 18, pp. 3272-3276, 2000.
6. G. P. Monnelly, D. Breslau, N. Butler, C. G. Chen, L. M. Cohen, W. Gu, R. K. Heilmann, P. T. Konkola, O. Mongrard, G. R. Ricker, and M. L. Schattenburg, "High-accuracy x-ray foil optic assembly," in X-Ray Optics, Instruments, and Missions IV, R. B. Hoover and A. B. Walker, eds., Proc. SPIE 4138, pp. 164-173, 2000.
7. C. G. Chen, Microcomb Fabrication for High Accuracy Foil X-ray Telescope Assembly and Vector Gaussian Beam Modeling, Master's thesis, Dept. of Electrical Engineering and Computer Science, MIT, 2000.
8. O. Mongrard, High-Accuracy Foil Optics for X-ray Astronomy, Master's thesis, Dept. of Aeronautics and Astronautics, MIT, 2001.
9. O. Mongrard, N. Butler, C. G. Chen, R. K. Heilmann, P. T. Konkola, M. McGuirk, G. Monnelly, G. S. Pati, G. R. Ricker, M. L. Schattenburg, and L. Cohen, "High precision assembly and metrology of x-ray foil optics," in Proceedings of the 16th Annual Meeting, The American Society for Precision Engineering 25, pp. 40-43, 2001.
10. Y. Sun, R. K. Heilmann, C. G. Chen, M. J. Spenko, C. R. Forest, and M. L. Schattenburg, "Precision microcomb design and fabrication for x-ray optics assembly," submitted to J. Vac. Sci. Technol. B 21, 2003.
11. E. G. Loewen and E. Popov, Diffraction Gratings and Applications, Marcel Dekker, Inc., New York, 1997.
12. W. Werner, "X-ray efficiencies of blazed gratings in extreme off-plane mountings," Appl. Opt. 16, pp. 2078-2080, 1977.
13. P. Vincent, M. Nevière, and D. Maystre, "X-ray gratings: The GMS mount," Appl. Opt. 18, pp. 1780-1783, 1979.
14. J. W. den Herder et al., "Performance and results of the reflection grating spectrometers on-board XMM-Newton," in X-Ray and Gamma-Ray Telescopes and Instruments for Astronomy, J. E. Trumper and H. D. Tananbaum, eds., Proc. SPIE 4851, pp. 196-207, 2003.
15. L. I. Goray, "Rigorous efficiency calculations for blazed gratings working in in-plane and off-plane mountings in the 5-50 Å wavelengths range," in Optics for EUV, X-Ray, and Gamma-Ray Astronomy, O. Citterio and S. L. O'Dell, eds., Proc. SPIE 5168, (these proceedings).
16. W. C. Cash, "X-ray optics. 2: A technique for high resolution spectroscopy," Appl. Opt. 30. pp. 1749-1759, 1991.
17. R. McEntaffer, W. Cash, and A. Shipley, "Off-plane gratings for Constellation-X," in X-Ray and Gamma-Ray Telescopes and Instruments for Astronomy, J. E. Trumper and H. D. Tananbaum, eds., Proc. SPIE 4851, pp. 549-556, 2003.
18. A. E. Franke, M. L. Schattenburg, E. M. Gullikson, J. Cottam, S. M. Kahn, and A. Rasmussen, "Super-smooth x-ray reflection grating fabrication." J. Vac. Sci. Technol. B 15, pp. 2940-2945, 1997.
19. C.-H. Chang, R. K. Heilmann, R. C. Fleming, J. Carter, E. Murphy, M. L. Schattenburg, T. C. Bailey, J. G. Ekerdt, R. D. Frankel, and R. Voisin, "Fabrication of saw-tooth diffraction gratings using nanoimprint lithography," submitted to J. Vac. Sci. Technol. B 21, 2003.
20. R. L. McEntaffer, F. R. Hearty, B. Gleeson, and W. C. Cash, "An x-ray test facility for diffraction gratings," in Optics for EUV, X-Ray, and Gamma-Ray Astronomy, O. Citterio and S. L. O'Dell, eds., Proc. SPIE 5168, (these proceedings).
21. A. P. Rasmussen et al., "Grating arrays for high-throughput soft x-ray spectrometer," in Optics for EUV, X-Ray, and Gamma-Ray Astronomy, O. Citterio and S. L. O'Dell, eds., Proc. SPIE 5168, (these proceedings).
22. R. L. McEntaffer, S. N. Osterman, W. C. Cash, J. Gilchrist, J. Flamand, B. Touzet, F. Bonnemason, and C. Brach, "X-ray performance of gratings in the extreme off-plane mount," in Optics for EUV, X-Ray, and Gamma-Ray Astronomy, O. Citterio and S. L. O'Dell, eds., Proc. SPIE 5168, (these proceedings).
23. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, "Imprint of sub-25 nm vias and trenches in polymers," Appl. Phys. Lett. 67, pp. 3114-3116, 1995.
24. T. C. Bailey, B. J. Choi, M. Colburn, M. Meissl, S. Shaya, J. G. Ekerdt, S. V. Sreenivasan, and C. G. Willson, "Step and flash imprint lithography: Template surface treatment and defect analysis," J. Vac. Sci. Technol. B 18, pp. 3572-3577, 2000.
25. J. Ferrera, M. L. Schattenburg, and H. I. Smith, "Analysis of distortion in interferometric lithography," J. Vac. Sci. Technol. B 14, pp. 4009-4013, 1996.
26. M. L. Schattenburg, C. G. Chen, P. N. Everett, J. Ferrera, P. T. Konkola, and H. I. Smith, "Sub-100 nm metrology using interferometrically produced fiducials," J. Vac. Sci. Technol. B 17, pp. 2692-2697, 1999.
27. P. T. Konkola, C. G. Chen, R. K. Heilmann, and M. L. Schattenburg, "Beam steering system and spatial filtering applied to interference lithography," J. Vac. Sci. Technol. B 18, pp. 3282-3286, 2000.
28. R. K. Heilmann, P. T. Konkola, C. G. Chen, G. S. Pati, and M. L. Schattenburg, "Digital heterodyne interference fringe control system," J. Vac. Sci. Technol. B 19, pp. 2342-2346, 2001.
29. C. G. Chen, P. T. Konkola, R. K. Heilmann, G. S. Pati, and M. L. Schattenburg, "Image metrology and system controls for scanning beam interference lithography," J. Vac. Sci. Technol. B 19, pp. 2335-2341, 2001.
30. C. G. Chen, R. K. Heilmann, C. Joo, P. T. Konkola, G. S. Pati, and M. L. Schattenburg, "Beam alignment for scanning beam interference lithography," J. Vac. Sci. Technol. B 20, pp. 3071-3074, 2002.
31. C. G. Chen, P. T. Konkola, R. K. Heilmann, C. Joo, and M. L. Schattenburg, "Nanometer-accurate grating fabrication with scanning beam interference lithography," in Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, D. K. Sood, ed., Proc. SPIE 4936, pp. 126-134, 2002.
32. P. T. Konkola, Design and Analysis of a Scanning Beam Interference Lithography System for Patterning Gratings with Nanometer-Level Distortions, Ph. D. thesis, Dept. of Mechanical Engneering, MIT, 2003.
33. C. G. Chen, Beam Alignment and Image Metrology for Scanning Beam Interference Lithography - Fabricating Gratings with Nanometer Phase Accuracy, Ph. D. thesis, Dept. of Electrical Engineering and Computer Science, MIT, 2003.
34. P. T. Konkola, C. G. Chen, R. K. Heilmann, C. Joo, J. C. Montoya, C.-H. Chang, and M. L. Schattenburg, "Nanometer-level repeatable metrology using the Nanoruler," submitted to J. Vac. Sci. Technol. B 21, 2003.
35. W. C. Cash, "X-ray spectrographs using radial groove gratings," Appl. Opt. 22, pp. 3971-3976, 1983.
36. M. C. Hettrick, "Aberrations of varied line-space grazing incidence gratings in converging light beams," Appl. Opt. 23, pp. 3221-3235, 1984.
37. M. L. Schattenburg, C. G. Chen, R. K. Heilmann, P. T. Konkola, and G. S. Pati, "Progress toward a general grating pattern technology using phase-locked scanning beams," in Optical Spectrocopic Techniques and Instrumentation for Atmospheric and Space Research IV, S. C. Barden and M. G. Mlynczak, eds., Proc. SPIE 4485, pp. 378-384, 2002.
38. G. S. Pati, R. K. Heilmann, P. T. Konkola, C. Joo, C. G. Chen, E. Murphy, and M. L. Schattenburg, "A generalized scanning beam interference lithography system for patterning gratings with variable period progression," J. Vac. Sci. Technol. B 20, pp. 2617-2621, 2002.
39. C. R. Forest, M. Akilian, G. Vincent, A. Lamure, and M. L. Schattenburg, "Thin glass optic and silicon wafer deformation and kinematic constraint," submitted to Proceedings of the 18th Annual Meeting, The American Society for Precision Engineering 29, 2003.