Precision shaping, assembly and metrology of foil optics for X-ray reflection gratings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4851, Issue 1, 2002, Pages 538-548

  Forest, Craig R ^a   Schattenburg, Mark L ^a   Chen, Carl G ^a   Heilmann, Ralf K ^a   Konkola, Paul T ^a   Przbylowski, JoHanna ^a   Sun, Yanxia ^a   You, Jenny ^a   Kahn, Steven M ^b   Golini, Don ^c  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Department of Physics ^*  (United States)

^c QED TECHNOLOGIES   (United States)

Author keywords

Constellation X; Magneto rheologic finishing; MEMS; Metrology; Mirror alignment; MRF; Precision assembly; Reflection gratings; Shack Hartmann; Wavefront sensing; X ray telescopes

Indexed keywords

ASTROPHYSICS; DIFFRACTION GRATINGS; MEASUREMENTS; MICROELECTROMECHANICAL DEVICES; OPTICAL TELESCOPES; X RAY SPECTROSCOPY;

FOIL OPTICS;

X RAY OPTICS;

EID: 0037957335     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.461477     Document Type: Conference Paper

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