Microcomb design and fabrication for high accuracy optical assembly

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 3272-3276

  Chen, Carl G ^a   Heilmann, Ralf K ^a   Konkola, Paul T ^a   Mongrard, Olivier ^a   Monnelly, Glen P ^a   Schattenburg, Mark L ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE ANALYSIS; IMAGE QUALITY; INTERFACES (MATERIALS); MICROELECTROMECHANICAL DEVICES;

FOIL ALIGNMENT; FOIL X-RAY OPTICS; MICROCOMBS;

OPTICS;

EID: 0034318649     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1313585     Document Type: Article

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