Super-smooth x-ray reflection grating fabrication

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2940-2945

  Franke, A E ^a   Schattenburg, M L ^a   Gullikson, E M ^b   Cottam, J ^c   Kahn, S M ^c   Rasmussen, A ^c  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c Columbia University ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000453768     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589759     Document Type: Article

References (17)

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