Digital heterodyne interference fringe control system

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 6, 2001, Pages 2342-2346

  Heilmann, Ralf K ^a   Konkola, Paul T ^a   Chen, Carl G ^a   Pati, G S ^a   Schattenburg, Mark L ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTOOPTICAL EFFECTS; ELECTROOPTICAL DEVICES; HETERODYNING; MIRRORS; PHASE SHIFT; PHOTODIODES; PIEZOELECTRIC TRANSDUCERS; SIGNAL INTERFERENCE;

DIGITAL HETERODYNE INTERFERENCE FRINGE CONTROL SYSTEM; ELECTROOPTIC MODULATOR; SCANNING BEAM INTERFERENCE LITHOGRAPHY;

LITHOGRAPHY;

EID: 0035519436     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1410096     Document Type: Article

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