Sub-100 nm metrology using interferometrically produced fiducials

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2692-2697

  Schattenburg, M L ^a   Chen, C ^a   Everett, P N ^a   Ferrera, J ^a   Konkola, P ^a   Smith, Henry I ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033275684     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591047     Document Type: Article

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