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New Diamond and Frontier Carbon Technology

Volumn 10, Issue 3, 2000, Pages 161-175

Micromachining of Diamond Thin Film

(1) Shibata, Takayuki a

a HOKKAIDO UNIVERSITY (Japan)

Author keywords

Diamond film; MEMS; Micromachining; Microsensors; Microstructures

Indexed keywords

EID: 0347938623 PISSN: 13449931 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (6)

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